Investigation of micro solid immersion lens mounting systems

Matthew Lang; Tom D. Milster; Takahisa Minamitani; Gregg Borek

doi:10.1143/JJAP.46.3737

Investigation of micro solid immersion lens mounting systems

Matthew Lang, Tom D. Milster, Takahisa Minamitani, Gregg Borek

Optical Sciences, College of

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

Concept, design and analysis of several solid immersion lens (SIL) mounting systems utilizing high-index refractive micro SILs are described. This paper proposes several designs for wafer-scale SIL assemblies capable of a numerical aperture of 2.2.

Original language	English (US)
Pages (from-to)	3737-3740
Number of pages	4
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	46
Issue number	6 B
DOIs	https://doi.org/10.1143/JJAP.46.3737
State	Published - Jun 22 2007

Keywords

Gallium phosphide
Lithography
Micro-optics
Solid immersion lens

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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title = "Investigation of micro solid immersion lens mounting systems",

abstract = "Concept, design and analysis of several solid immersion lens (SIL) mounting systems utilizing high-index refractive micro SILs are described. This paper proposes several designs for wafer-scale SIL assemblies capable of a numerical aperture of 2.2.",

keywords = "Gallium phosphide, Lithography, Micro-optics, Solid immersion lens",

author = "Matthew Lang and Milster, {Tom D.} and Takahisa Minamitani and Gregg Borek",

year = "2007",

month = jun,

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doi = "10.1143/JJAP.46.3737",

language = "English (US)",

volume = "46",

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publisher = "Japan Society of Applied Physics",

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T1 - Investigation of micro solid immersion lens mounting systems

AU - Lang, Matthew

AU - Milster, Tom D.

AU - Minamitani, Takahisa

AU - Borek, Gregg

PY - 2007/6/22

Y1 - 2007/6/22

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AB - Concept, design and analysis of several solid immersion lens (SIL) mounting systems utilizing high-index refractive micro SILs are described. This paper proposes several designs for wafer-scale SIL assemblies capable of a numerical aperture of 2.2.

KW - Gallium phosphide

KW - Lithography

KW - Micro-optics

KW - Solid immersion lens

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M3 - Article

AN - SCOPUS:34547922051

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SP - 3737

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 6 B

ER -

Investigation of micro solid immersion lens mounting systems

Abstract

Keywords

ASJC Scopus subject areas

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