Investigation of micro solid immersion lens mounting systems

Matthew Lang; Thomas D Milster; Takahisa Minamitani; Gregg Borek

doi:10.1143/JJAP.46.3737

Investigation of micro solid immersion lens mounting systems

Matthew Lang, Thomas D Milster, Takahisa Minamitani, Gregg Borek

Optical Sciences, College of

Research output: Contribution to journal › Article

8 Scopus citations

Abstract

Concept, design and analysis of several solid immersion lens (SIL) mounting systems utilizing high-index refractive micro SILs are described. This paper proposes several designs for wafer-scale SIL assemblies capable of a numerical aperture of 2.2.

Original language	English (US)
Pages (from-to)	3737-3740
Number of pages	4
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	46
Issue number	6 B
DOIs	https://doi.org/10.1143/JJAP.46.3737
Publication status	Published - Jun 22 2007

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Keywords

Gallium phosphide
Lithography
Micro-optics
Solid immersion lens

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Cite this

Lang, M., Milster, T. D., Minamitani, T., & Borek, G. (2007). Investigation of micro solid immersion lens mounting systems. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 46(6 B), 3737-3740. https://doi.org/10.1143/JJAP.46.3737

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keywords = "Gallium phosphide, Lithography, Micro-optics, Solid immersion lens",

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Access to Document

10.1143/JJAP.46.3737