Abstract
Concept, design and analysis of several solid immersion lens (SIL) mounting systems utilizing high-index refractive micro SILs are described. This paper proposes several designs for wafer-scale SIL assemblies capable of a numerical aperture of 2.2.
Original language | English (US) |
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Pages (from-to) | 3737-3740 |
Number of pages | 4 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 46 |
Issue number | 6 B |
DOIs | |
State | Published - Jun 22 2007 |
Keywords
- Gallium phosphide
- Lithography
- Micro-optics
- Solid immersion lens
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)