Investigation of micro solid immersion lens mounting systems

Matthew Lang, Thomas D Milster, Takahisa Minamitani, Gregg Borek

Research output: Contribution to journalArticle

8 Scopus citations

Abstract

Concept, design and analysis of several solid immersion lens (SIL) mounting systems utilizing high-index refractive micro SILs are described. This paper proposes several designs for wafer-scale SIL assemblies capable of a numerical aperture of 2.2.

Original languageEnglish (US)
Pages (from-to)3737-3740
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number6 B
DOIs
Publication statusPublished - Jun 22 2007

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Keywords

  • Gallium phosphide
  • Lithography
  • Micro-optics
  • Solid immersion lens

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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