Kinetic to transport-limited anhydrous HF etching of silicon oxynitride films in supercritical CO 2

Rachel Morrish, Ann Witvrouw, Anthony J. Muscat

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Fingerprint

Dive into the research topics of 'Kinetic to transport-limited anhydrous HF etching of silicon oxynitride films in supercritical CO <sub>2</sub>'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds