Laser-dilatometer calibration using a single-crystal silicon sample

Ines Hamann, Josep Sanjuan, Ruven Spannagel, Martin Gohlke, Gudrun Wanner, Sönke Schuster, Felipe Guzman, Claus Braxmaier

Research output: Contribution to journalArticle

Abstract

Marginal changes in geometrical dimensions due to temperature changes affect the performance of optical instruments. Highly dimensionally stable materials can minimize these effects since they offer low coefficients of thermal expansion (CTE). Our dilatometer, based on heterodyne interferometry, is able to determine the CTE in 10-8 K-1 range. Here, we present the improved interferometer performance using angular measurements via differential wavefront sensing to correct for tilt-to-length coupling. The setup was tested by measuring the CTE of a single-crystal silicon at 285 K. Results are in good agreement with the reported values and show a bias of less than 1%.

Original languageEnglish (US)
Pages (from-to)18-29
Number of pages12
JournalInternational Journal of Optomechatronics
Volume13
Issue number1
DOIs
StatePublished - Jan 1 2019

    Fingerprint

Keywords

  • Dilatometry
  • differential wavefront sensing
  • silicon
  • simulation

ASJC Scopus subject areas

  • Instrumentation
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Hamann, I., Sanjuan, J., Spannagel, R., Gohlke, M., Wanner, G., Schuster, S., Guzman, F., & Braxmaier, C. (2019). Laser-dilatometer calibration using a single-crystal silicon sample. International Journal of Optomechatronics, 13(1), 18-29. https://doi.org/10.1080/15599612.2019.1587117