Low-coherence interferometer measuring absolute thickness and topography with high accuracy

Yang Zhao, Greg Schmidt, Jonathan D. Ellis, Duncan T. Moore

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An interferometer was developed to measure the absolute thickness map of plane-parallel optical samples up to 50 mm diameter, with 30 nm repeatability, and <100 nm accuracy. The surface topography of the sample was also measured and compared to be consistent with a Zygo white light interferometer.

Original languageEnglish (US)
Title of host publicationOptical Design and Fabrication, OFT 2017
PublisherOSA - The Optical Society
ISBN (Electronic)9781557528209
DOIs
StatePublished - Jan 1 2017
Externally publishedYes
EventOptical Design and Fabrication, OFT 2017 - Denver, United States
Duration: Jul 9 2017Jul 13 2017

Publication series

NameOptics InfoBase Conference Papers
VolumePart F56-OFT 2017

Other

OtherOptical Design and Fabrication, OFT 2017
CountryUnited States
CityDenver
Period7/9/177/13/17

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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