Low-loss quasi-planar ridge waveguides formed on thin silicon-on-insulator

M. A. Webster, R. M. Pafchek, G. Sukumaran, Thomas L Koch

Research output: Contribution to journalArticle

50 Citations (Scopus)

Abstract

Low-loss, quasi-planar ridge waveguide structures have been designed and fabricated in silicon-on-insulator material with waveguide propagation losses of <0.7 dBcm at 1550 nm, and a Q∼ 106 measured in a ring resonator configuration. These structures offer tight vertical field confinement with scalable bending losses, and should be of interest for integration with both active and passive components. Waveguides were fabricated using optical lithography and processing compatible with silicon electronics.

Original languageEnglish (US)
Article number231108
Pages (from-to)1-3
Number of pages3
JournalApplied Physics Letters
Volume87
Issue number23
DOIs
StatePublished - 2005
Externally publishedYes

Fingerprint

ridges
insulators
waveguides
silicon
lithography
resonators
propagation
rings
configurations
electronics

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Low-loss quasi-planar ridge waveguides formed on thin silicon-on-insulator. / Webster, M. A.; Pafchek, R. M.; Sukumaran, G.; Koch, Thomas L.

In: Applied Physics Letters, Vol. 87, No. 23, 231108, 2005, p. 1-3.

Research output: Contribution to journalArticle

Webster, M. A. ; Pafchek, R. M. ; Sukumaran, G. ; Koch, Thomas L. / Low-loss quasi-planar ridge waveguides formed on thin silicon-on-insulator. In: Applied Physics Letters. 2005 ; Vol. 87, No. 23. pp. 1-3.
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