Quasi-transverse-magnetic-mode propagation loss of 1.83 dB/cm at λ = 1.565 μm is achieved in horizontal Si(amorphous)-SiO2-Si(crystalline) slot waveguides with 8.3-nm slots fabricated on silicon-on-insulator. Waveguide loss is measured using a ring resonator with Q ∼ 3 × 105.
- Dielectric waveguides
- Silicon-on-insulator technology
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering