Low loss Si-SiO2-Si 8-nm slot waveguides

R. M. Pafchek, J. Li, R. S. Tummidi, Thomas L Koch

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Quasi-transverse-magnetic-mode propagation loss of 1.83 dB/cm at λ = 1.565 μm is achieved in horizontal Si(amorphous)-SiO2-Si(crystalline) slot waveguides with 8.3-nm slots fabricated on silicon-on-insulator. Waveguide loss is measured using a ring resonator with Q ∼ 3 × 105.

Original languageEnglish (US)
Pages (from-to)353-355
Number of pages3
JournalIEEE Photonics Technology Letters
Volume21
Issue number6
DOIs
StatePublished - Mar 15 2009
Externally publishedYes

Fingerprint

Electric losses
Silicon
slots
Resonators
Waveguides
Crystalline materials
waveguides
propagation modes
resonators
insulators
rings
silicon

Keywords

  • Dielectric waveguides
  • Silicon-on-insulator technology

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials

Cite this

Low loss Si-SiO2-Si 8-nm slot waveguides. / Pafchek, R. M.; Li, J.; Tummidi, R. S.; Koch, Thomas L.

In: IEEE Photonics Technology Letters, Vol. 21, No. 6, 15.03.2009, p. 353-355.

Research output: Contribution to journalArticle

Pafchek, R. M. ; Li, J. ; Tummidi, R. S. ; Koch, Thomas L. / Low loss Si-SiO2-Si 8-nm slot waveguides. In: IEEE Photonics Technology Letters. 2009 ; Vol. 21, No. 6. pp. 353-355.
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