Low loss Si-SiO2-Si 8nm slot waveguides

R. M. Pafchek, J. Li, R. S. Tummidi, Thomas L Koch

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

Quasi-TM-mode propagation loss of 1.83dB/cm at λ = 1.565 μm is achieved in horizontal Si(amorphous)-SiO2-Si(crystalline) slot waveguides with 8.3nm slots fabricated on silicon-on-insulator. Waveguide loss is measured using a ring resonator with Q ∼ 3×105.

Original languageEnglish (US)
Title of host publication2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS
DOIs
StatePublished - 2008
Externally publishedYes
EventConference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008 - San Jose, CA, United States
Duration: May 4 2008May 9 2008

Other

OtherConference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008
CountryUnited States
CitySan Jose, CA
Period5/4/085/9/08

Fingerprint

Electric losses
Silicon
Resonators
Waveguides
Crystalline materials

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Pafchek, R. M., Li, J., Tummidi, R. S., & Koch, T. L. (2008). Low loss Si-SiO2-Si 8nm slot waveguides. In 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS [4551525] https://doi.org/10.1109/CLEO.2008.4551525

Low loss Si-SiO2-Si 8nm slot waveguides. / Pafchek, R. M.; Li, J.; Tummidi, R. S.; Koch, Thomas L.

2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS. 2008. 4551525.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Pafchek, RM, Li, J, Tummidi, RS & Koch, TL 2008, Low loss Si-SiO2-Si 8nm slot waveguides. in 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS., 4551525, Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008, San Jose, CA, United States, 5/4/08. https://doi.org/10.1109/CLEO.2008.4551525
Pafchek RM, Li J, Tummidi RS, Koch TL. Low loss Si-SiO2-Si 8nm slot waveguides. In 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS. 2008. 4551525 https://doi.org/10.1109/CLEO.2008.4551525
Pafchek, R. M. ; Li, J. ; Tummidi, R. S. ; Koch, Thomas L. / Low loss Si-SiO2-Si 8nm slot waveguides. 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS. 2008.
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