Low-loss thin SOI waveguides and high-Q ring resonators

M. A. Webster, R. M. Pafchek, G. Sukumaran, Thomas L Koch

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report quasi-planar ridge waveguides with losses of < 0.7dB/cm in thin silicon-oninsulator material including waveguide-based ring resonators with quality factors of Q ~ 106.

Original languageEnglish (US)
Title of host publicationOptics InfoBase Conference Papers
PublisherOptical Society of America
ISBN (Print)1557527970, 9781557527974
StatePublished - 2005
Externally publishedYes
EventFrontiers in Optics, FiO 2005 - Tucson, AZ, United States
Duration: Oct 16 2005Oct 21 2005

Other

OtherFrontiers in Optics, FiO 2005
CountryUnited States
CityTucson, AZ
Period10/16/0510/21/05

Fingerprint

Ridge waveguides
Planar waveguides
SOI (semiconductors)
Q factors
Resonators
Waveguides
resonators
waveguides
Silicon
rings
ridges
silicon

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Webster, M. A., Pafchek, R. M., Sukumaran, G., & Koch, T. L. (2005). Low-loss thin SOI waveguides and high-Q ring resonators. In Optics InfoBase Conference Papers Optical Society of America.

Low-loss thin SOI waveguides and high-Q ring resonators. / Webster, M. A.; Pafchek, R. M.; Sukumaran, G.; Koch, Thomas L.

Optics InfoBase Conference Papers. Optical Society of America, 2005.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Webster, MA, Pafchek, RM, Sukumaran, G & Koch, TL 2005, Low-loss thin SOI waveguides and high-Q ring resonators. in Optics InfoBase Conference Papers. Optical Society of America, Frontiers in Optics, FiO 2005, Tucson, AZ, United States, 10/16/05.
Webster MA, Pafchek RM, Sukumaran G, Koch TL. Low-loss thin SOI waveguides and high-Q ring resonators. In Optics InfoBase Conference Papers. Optical Society of America. 2005
Webster, M. A. ; Pafchek, R. M. ; Sukumaran, G. ; Koch, Thomas L. / Low-loss thin SOI waveguides and high-Q ring resonators. Optics InfoBase Conference Papers. Optical Society of America, 2005.
@inproceedings{f60b2918a24d41eab00aa3bdc0ec94af,
title = "Low-loss thin SOI waveguides and high-Q ring resonators",
abstract = "We report quasi-planar ridge waveguides with losses of < 0.7dB/cm in thin silicon-oninsulator material including waveguide-based ring resonators with quality factors of Q ~ 106.",
author = "Webster, {M. A.} and Pafchek, {R. M.} and G. Sukumaran and Koch, {Thomas L}",
year = "2005",
language = "English (US)",
isbn = "1557527970",
booktitle = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America",

}

TY - GEN

T1 - Low-loss thin SOI waveguides and high-Q ring resonators

AU - Webster, M. A.

AU - Pafchek, R. M.

AU - Sukumaran, G.

AU - Koch, Thomas L

PY - 2005

Y1 - 2005

N2 - We report quasi-planar ridge waveguides with losses of < 0.7dB/cm in thin silicon-oninsulator material including waveguide-based ring resonators with quality factors of Q ~ 106.

AB - We report quasi-planar ridge waveguides with losses of < 0.7dB/cm in thin silicon-oninsulator material including waveguide-based ring resonators with quality factors of Q ~ 106.

UR - http://www.scopus.com/inward/record.url?scp=84899153217&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84899153217&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84899153217

SN - 1557527970

SN - 9781557527974

BT - Optics InfoBase Conference Papers

PB - Optical Society of America

ER -