Macromolecule formation in low density CF4 plasmas: The influence of H2

M. J. Schabel, T. W. Peterson, Anthony J Muscat

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

Plasma experiments were used to show that macromolecule formation can occur homogeneously in a plasma, and is strongly related to the plasma operating parameters and the amount of hydrogen added to the reactor. A commercially available plasma chemistry model was used in conjunction with the experiments. A growth mechanism and simulated results suggested that macromolecules formed through CF3 propagation reactions with CwF2w+1 radicals produced by electron impact dissociation of fluoroalkane species.

Original languageEnglish (US)
Pages (from-to)1389-1402
Number of pages14
JournalJournal of Applied Physics
Volume93
Issue number3
DOIs
StatePublished - Feb 1 2003

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macromolecules
plasma density
plasma chemistry
electron impact
reactors
dissociation
propagation
hydrogen

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

Macromolecule formation in low density CF4 plasmas : The influence of H2. / Schabel, M. J.; Peterson, T. W.; Muscat, Anthony J.

In: Journal of Applied Physics, Vol. 93, No. 3, 01.02.2003, p. 1389-1402.

Research output: Contribution to journalArticle

Schabel, M. J. ; Peterson, T. W. ; Muscat, Anthony J. / Macromolecule formation in low density CF4 plasmas : The influence of H2. In: Journal of Applied Physics. 2003 ; Vol. 93, No. 3. pp. 1389-1402.
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