Macromolecule formation in low density CF4 plasmas: The influence of H2

M. J. Schabel, T. W. Peterson, Anthony J Muscat

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Abstract

Plasma experiments were used to show that macromolecule formation can occur homogeneously in a plasma, and is strongly related to the plasma operating parameters and the amount of hydrogen added to the reactor. A commercially available plasma chemistry model was used in conjunction with the experiments. A growth mechanism and simulated results suggested that macromolecules formed through CF3 propagation reactions with CwF2w+1 radicals produced by electron impact dissociation of fluoroalkane species.

Original languageEnglish (US)
Pages (from-to)1389-1402
Number of pages14
JournalJournal of Applied Physics
Volume93
Issue number3
DOIs
Publication statusPublished - Feb 1 2003

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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