Maskless lithography tool for fabrication and inspection of diffractive optical elements and computer generated holograms

M. Zaverton, J. Sierchio, Y. S. Kim, D. Hansen, W. Bletcher, J. Tamkin, Thomas D Milster

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A high-speed maskless lithography tool is described for fabricating diffractive optical elements and computer generated holograms. The system has the capability to write gray-scale features is also used for inspection of the sample after fabrication.

Original languageEnglish (US)
Title of host publicationOptics InfoBase Conference Papers
StatePublished - 2010
EventOptical Fabrication and Testing, OFT 2010 - Jackson Hole, WY, United States
Duration: Jun 13 2010Jun 17 2010

Other

OtherOptical Fabrication and Testing, OFT 2010
CountryUnited States
CityJackson Hole, WY
Period6/13/106/17/10

Fingerprint

Diffractive optical elements
gray scale
Holograms
Lithography
inspection
lithography
Inspection
high speed
Fabrication
fabrication

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Zaverton, M., Sierchio, J., Kim, Y. S., Hansen, D., Bletcher, W., Tamkin, J., & Milster, T. D. (2010). Maskless lithography tool for fabrication and inspection of diffractive optical elements and computer generated holograms. In Optics InfoBase Conference Papers

Maskless lithography tool for fabrication and inspection of diffractive optical elements and computer generated holograms. / Zaverton, M.; Sierchio, J.; Kim, Y. S.; Hansen, D.; Bletcher, W.; Tamkin, J.; Milster, Thomas D.

Optics InfoBase Conference Papers. 2010.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zaverton, M, Sierchio, J, Kim, YS, Hansen, D, Bletcher, W, Tamkin, J & Milster, TD 2010, Maskless lithography tool for fabrication and inspection of diffractive optical elements and computer generated holograms. in Optics InfoBase Conference Papers. Optical Fabrication and Testing, OFT 2010, Jackson Hole, WY, United States, 6/13/10.
Zaverton M, Sierchio J, Kim YS, Hansen D, Bletcher W, Tamkin J et al. Maskless lithography tool for fabrication and inspection of diffractive optical elements and computer generated holograms. In Optics InfoBase Conference Papers. 2010
Zaverton, M. ; Sierchio, J. ; Kim, Y. S. ; Hansen, D. ; Bletcher, W. ; Tamkin, J. ; Milster, Thomas D. / Maskless lithography tool for fabrication and inspection of diffractive optical elements and computer generated holograms. Optics InfoBase Conference Papers. 2010.
@inproceedings{7529732b48034eb49e29176f29b6025c,
title = "Maskless lithography tool for fabrication and inspection of diffractive optical elements and computer generated holograms",
abstract = "A high-speed maskless lithography tool is described for fabricating diffractive optical elements and computer generated holograms. The system has the capability to write gray-scale features is also used for inspection of the sample after fabrication.",
author = "M. Zaverton and J. Sierchio and Kim, {Y. S.} and D. Hansen and W. Bletcher and J. Tamkin and Milster, {Thomas D}",
year = "2010",
language = "English (US)",
isbn = "9781557528933",
booktitle = "Optics InfoBase Conference Papers",

}

TY - GEN

T1 - Maskless lithography tool for fabrication and inspection of diffractive optical elements and computer generated holograms

AU - Zaverton, M.

AU - Sierchio, J.

AU - Kim, Y. S.

AU - Hansen, D.

AU - Bletcher, W.

AU - Tamkin, J.

AU - Milster, Thomas D

PY - 2010

Y1 - 2010

N2 - A high-speed maskless lithography tool is described for fabricating diffractive optical elements and computer generated holograms. The system has the capability to write gray-scale features is also used for inspection of the sample after fabrication.

AB - A high-speed maskless lithography tool is described for fabricating diffractive optical elements and computer generated holograms. The system has the capability to write gray-scale features is also used for inspection of the sample after fabrication.

UR - http://www.scopus.com/inward/record.url?scp=84896785725&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84896785725&partnerID=8YFLogxK

M3 - Conference contribution

SN - 9781557528933

BT - Optics InfoBase Conference Papers

ER -