Maximum likelihood estimation as a general method of combining sub-aperture data for interferometric testing

Peng Su, Jim Burge, Robert A. Sprowl, Jose Sasian

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

By making multiple interferometric measurements of reference and test surfaces that are translated and rotated, we obtain sufficient information to reconstruct both surfaces. We use maximum likelihood estimation to obtain a 1 nm rms error.

Original languageEnglish (US)
Title of host publicationInternational Optical Design Conference, IODC 2006
PublisherOptical Society of America
ISBN (Print)155752811X, 9781557528117
StatePublished - Jan 1 2006
EventInternational Optical Design Conference, IODC 2006 - Vancouver, Canada
Duration: Jun 4 2006Jun 4 2006

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherInternational Optical Design Conference, IODC 2006
CountryCanada
CityVancouver
Period6/4/066/4/06

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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