Measurement of contaminant adsorption by quartz crystal microbalance techniques

Kyeong T. Lee, Srini Raghavan

Research output: Contribution to journalConference article

2 Scopus citations

Abstract

The adsorption of selected compounds of interest to semiconductor processing onto metallic and semiconductor surfaces has been investigated using a quartz crystal microbalance (QCM) technique. The effect of variables such as solution pH and concentration on adsorption has been characterized. Improvement of the sensitivity of the technique using an electrical bias to the crystal electrode has been explored.

Original languageEnglish (US)
Pages (from-to)368-373
Number of pages6
JournalInstitute of Environmental Sciences - Proceedings, Annual Technical Meeting
StatePublished - Dec 1 1996
EventProceedings of the 1996 42nd Annual Technical Meeting of the Institute of Environmental Sciences - Orlando, FL, USA
Duration: May 12 1996May 16 1996

ASJC Scopus subject areas

  • Environmental Engineering

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