Measurement of small rotation angles by using a parallel interference pattern

Xiaoli Dai, Osami Sasaki, John E Greivenkamp, Takamasa Suzuki

Research output: Contribution to journalArticle

25 Scopus citations

Abstract

We propose a method for measuring rotation angles by using a parallel interference pattern. At two points on a parallel interference pattern reflected by an object, we detect phase changes in the reflected parallel interference pattern caused by rotations of the object. A high sensitivity, or a high ratio of the phase change to the rotation angle, 17 mrad/arcsec, can be achieved by determining the positions of two detection points. A high spatial resolution of 0.5 mm is also obtained. We analyze the measurement error caused by the alignment of the parallel interference pattern and a random measurement error caused by the phase detection. The theoretical analyses and the experimental results make the characteristics of the method clear and show that the method has an accuracy of 0.2 arcsec for small rotation angles.

Original languageEnglish (US)
Pages (from-to)6380-6388
Number of pages9
JournalApplied Optics
Volume34
Issue number28
DOIs
StatePublished - 1995

Keywords

  • Angle measurement
  • Interferometry
  • Parallel interference pattern

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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