Measurements of residual stresses in thin films using micro-rotating-structures

Xin Zhang, Tong Yi Zhang, Yitshak Zohar

Research output: Contribution to journalArticle

61 Citations (Scopus)

Abstract

In the present study, micro-rotating-structures for local measurements of residual stresses in a thin film were simulated by the finite element method (FEM). A sensitivity factor - the ratio of the deflection of the micro-structure to the normalized residual stress is introduced and tabulated from the FEM results. Thereafter, a formula to calculate the residual stress is given so that the residual stress can be easily evaluated from the deflection of the rotating beam. A variety of optimized micro-rotating-structures were then designed and fabricated to verify the FEM results. Residual stresses in both silicon nitride and polysilicon thin films were determined by this technique and compared with measurements by the wafer-curvature method. The two methods lead to comparable results. In addition, the micro-rotating-structures have the ability to measure spatially and locally a large range of residual tensile or compressive stresses.

Original languageEnglish (US)
Pages (from-to)97-105
Number of pages9
JournalThin Solid Films
Volume335
Issue number1-2
StatePublished - Nov 19 1998
Externally publishedYes

Fingerprint

residual stress
Residual stresses
Thin films
thin films
finite element method
Finite element method
deflection
tensile stress
Silicon nitride
Compressive stress
Polysilicon
silicon nitrides
Tensile stress
curvature
wafers
microstructure
Microstructure
sensitivity

Keywords

  • Micro-rotating-structures
  • Residual stresses

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Measurements of residual stresses in thin films using micro-rotating-structures. / Zhang, Xin; Zhang, Tong Yi; Zohar, Yitshak.

In: Thin Solid Films, Vol. 335, No. 1-2, 19.11.1998, p. 97-105.

Research output: Contribution to journalArticle

Zhang, Xin ; Zhang, Tong Yi ; Zohar, Yitshak. / Measurements of residual stresses in thin films using micro-rotating-structures. In: Thin Solid Films. 1998 ; Vol. 335, No. 1-2. pp. 97-105.
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