Measuring and removing dissolved and colloidal silica in ultrapure water

Johanes Wibowo, Farhang Shadman, David Blackford

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish (US)
Pages (from-to)41-50
Number of pages10
JournalMICRO
Volume15
Issue number5
StatePublished - May 1997

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Silicon Dioxide
Silica
silicon dioxide
Water
water

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Materials Science(all)
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Measuring and removing dissolved and colloidal silica in ultrapure water. / Wibowo, Johanes; Shadman, Farhang; Blackford, David.

In: MICRO, Vol. 15, No. 5, 05.1997, p. 41-50.

Research output: Contribution to journalArticle

Wibowo, J, Shadman, F & Blackford, D 1997, 'Measuring and removing dissolved and colloidal silica in ultrapure water', MICRO, vol. 15, no. 5, pp. 41-50.
Wibowo, Johanes ; Shadman, Farhang ; Blackford, David. / Measuring and removing dissolved and colloidal silica in ultrapure water. In: MICRO. 1997 ; Vol. 15, No. 5. pp. 41-50.
@article{ffa128f5dda348f3b6ca964bb2982e0b,
title = "Measuring and removing dissolved and colloidal silica in ultrapure water",
author = "Johanes Wibowo and Farhang Shadman and David Blackford",
year = "1997",
month = "5",
language = "English (US)",
volume = "15",
pages = "41--50",
journal = "MICRO",
issn = "1081-0595",
publisher = "Canon Communications LLC",
number = "5",

}

TY - JOUR

T1 - Measuring and removing dissolved and colloidal silica in ultrapure water

AU - Wibowo, Johanes

AU - Shadman, Farhang

AU - Blackford, David

PY - 1997/5

Y1 - 1997/5

UR - http://www.scopus.com/inward/record.url?scp=0342275300&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0342275300&partnerID=8YFLogxK

M3 - Article

VL - 15

SP - 41

EP - 50

JO - MICRO

JF - MICRO

SN - 1081-0595

IS - 5

ER -