Measuring and removing dissolved and colloidal silica in ultrapure water

Johanes Wibowo, Farhang Shadman, David Blackford

Research output: Contribution to journalArticle

1 Scopus citations
Original languageEnglish (US)
Pages (from-to)41-50
Number of pages10
JournalMICRO
Volume15
Issue number5
StatePublished - May 1 1997

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Science(all)
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this