Measuring and removing dissolved and colloidal silica in ultrapure water

Johanes Wibowo, Farhang Shadman, David Blackford

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

This paper presents a promising new technique for ultrapure water systems that combines ultraviolet radiation and ozone to remove colloidal silica by converting it into dissolved silica. It also discusses the combined used of an on-line dissolved silica monitor and a nonvolatile residue monitor in ultrapure water that gives an overall measurement of both dissolved and colloidal silica in near real time.

Original languageEnglish (US)
Pages (from-to)8
Number of pages1
JournalMICRO
Volume15
Issue number5
StatePublished - May 1 1997

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Science(all)
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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