Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory

Eric W. Rogala, Harrison H Barrett

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel interferometer based upon a conventional phase-shifting design is presented. The aim is to introduce the capability of measuring both the surface profile and the complex index of refraction of the test surface. Maximum-likelihood estimation theory and Cramer-Rao lower bounds are introduced and shown to be an effective means of extracting the complex index and surface profile parameters from the measured data and quantitatively assessing the performance. As the design parameters are optimized, the results are shown to improve and approach the theoretical performance limit.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Pages177-178
Number of pages2
Volume2778
EditionPART 1
StatePublished - 1996
Event17th Congress of the International Commission for Optics: Optics for Science and New Technology, ICO 1996 - Taejon, Korea, Republic of
Duration: Aug 19 1996Aug 23 1996

Other

Other17th Congress of the International Commission for Optics: Optics for Science and New Technology, ICO 1996
CountryKorea, Republic of
CityTaejon
Period8/19/968/23/96

Fingerprint

Estimation Theory
Surface Profile
Phase Shifting
Maximum likelihood estimation
Maximum Likelihood Estimation
Cramer-Rao Lower Bound
Refraction
profiles
Parameter Design
Interferometer
Interferometers
refraction
interferometers
Design

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Rogala, E. W., & Barrett, H. H. (1996). Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory. In Proceedings of SPIE - The International Society for Optical Engineering (PART 1 ed., Vol. 2778, pp. 177-178)

Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory. / Rogala, Eric W.; Barrett, Harrison H.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2778 PART 1. ed. 1996. p. 177-178.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rogala, EW & Barrett, HH 1996, Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory. in Proceedings of SPIE - The International Society for Optical Engineering. PART 1 edn, vol. 2778, pp. 177-178, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, ICO 1996, Taejon, Korea, Republic of, 8/19/96.
Rogala EW, Barrett HH. Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory. In Proceedings of SPIE - The International Society for Optical Engineering. PART 1 ed. Vol. 2778. 1996. p. 177-178
Rogala, Eric W. ; Barrett, Harrison H. / Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2778 PART 1. ed. 1996. pp. 177-178
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