Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory

Eric W. Rogala, Harrison H. Barrett

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel interferometer based upon a conventional phase-shifting design is presented. The aim is to introduce the capability of measuring both the surface profile and the complex index of refraction of the test surface. Maximum-likelihood estimation theory and Cramer-Rao lower bounds are introduced and shown to be an effective means of extracting the complex index and surface profile parameters from the measured data and quantitatively assessing the performance. As the design parameters are optimized, the results are shown to improve and approach the theoretical performance limit.

Original languageEnglish (US)
Title of host publication17th Congress of the International Commission for Optics
Subtitle of host publicationOptics for Science and New Technology
Pages177-178
Number of pages2
EditionPART 1
StatePublished - Dec 1 1996
Event17th Congress of the International Commission for Optics: Optics for Science and New Technology, ICO 1996 - Taejon, Korea, Republic of
Duration: Aug 19 1996Aug 23 1996

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
NumberPART 1
Volume2778
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

Other17th Congress of the International Commission for Optics: Optics for Science and New Technology, ICO 1996
CountryKorea, Republic of
CityTaejon
Period8/19/968/23/96

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Rogala, E. W., & Barrett, H. H. (1996). Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory. In 17th Congress of the International Commission for Optics: Optics for Science and New Technology (PART 1 ed., pp. 177-178). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2778, No. PART 1).