Measuring rough optical surfaces using scanning long-wave optical test system. 1. Principle and implementation

Tianquan Su, Shanshan Wang, Robert E. Parks, Peng Su, James H. Burge

Research output: Contribution to journalArticle

25 Scopus citations

Abstract

Current metrology tools have limitations when measuring rough aspherical surfaces with 1-2 μm root mean square roughness; thus, the surface cannot be shaped accurately by grinding. To improve the accuracy of grinding, the scanning long-wave optical test system (SLOTS) has been developed to measure rough aspherical surfaces quickly and accurately with high spatial resolution and low cost. It is a longwave infrared deflectometry device consisting of a heated metal ribbon and an uncooled thermal imaging camera. A slope repeatability of 13.6 μrad and a root-mean-square surface accuracy of 31 nm have been achieved in the measurements of two 4 inch spherical surfaces. The shape of a rough surface ground with 44 μm grits was also measured, and the result matches that from a laser tracker measurement. With further calibration, SLOTS promises to provide robust guidance through the grinding of aspherics.

Original languageEnglish (US)
Pages (from-to)7117-7126
Number of pages10
JournalApplied optics
Volume52
Issue number29
DOIs
StatePublished - Oct 10 2013

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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