Measuring the radius of curvature of a spherical mirror with an interferometer and a laser tracker

Chunyu Zhao, Rene Zehnder, James H. Burge

Research output: Contribution to journalArticle

29 Scopus citations

Abstract

We present a method to accurately measure the radius of curvature of a concave spherical mirror with a phase-measuring interferometer and a laser tracker. Use of a laser tracker eases the alignment of the testing system, eliminates the need to move the test piece during the measurement, and improves the accuracy of the distance measurement. Using this method, we measured the radius of curvature of a spherical mirror 0.5 m in diameter and about 2.5 m in radius of curvature. The accuracy of the measurement is better than ±20 μm.

Original languageEnglish (US)
Article number090506
JournalOptical Engineering
Volume44
Issue number9
DOIs
StatePublished - Sep 1 2005

Keywords

  • Laser tracker
  • Metrology
  • Radius of curvature

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)

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