Mechanistic study of the deposition of metals from HF solutions onto silicon wafers

H. G. Parks, J Brent Hiskey, K. Yoneshige

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Process chemicals in use today are quite pure, depending on the grade used but can easily be contaminated with metal ions through improper handling or storage techniques. Such metal impurities, if deposited on wafer surfaces during processing can increase reverse-bias junction leakage, degrade oxide breakdown strength and increase metal oxide semiconductor capacitor leakage which in turn can adversely affect the function of ultra large scale integrated (ULSI) circuits. Because of these device effects and since metal contamination can come form several sources it is important to know the deposition level and mechanism on Si wafers from a given process solution. HF based process solution have been investigated due to their historical use in patterning, etching, and their increased use in advanced wafer cleaning processes.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings
EditorsPeter Borgesen, Klavs F. Jensen, Roger A. Pollak
PublisherPubl by Materials Research Society
Pages245-256
Number of pages12
Volume318
ISBN (Print)1558992170
StatePublished - 1994
EventProceedings of the Fall 1993 MRS Meeting - Boston, MA, USA
Duration: Nov 29 1993Dec 3 1993

Other

OtherProceedings of the Fall 1993 MRS Meeting
CityBoston, MA, USA
Period11/29/9312/3/93

Fingerprint

Silicon wafers
Metals
Oxides
Metal ions
Integrated circuits
Etching
Cleaning
Contamination
Capacitors
Impurities
Processing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Parks, H. G., Hiskey, J. B., & Yoneshige, K. (1994). Mechanistic study of the deposition of metals from HF solutions onto silicon wafers. In P. Borgesen, K. F. Jensen, & R. A. Pollak (Eds.), Materials Research Society Symposium Proceedings (Vol. 318, pp. 245-256). Publ by Materials Research Society.

Mechanistic study of the deposition of metals from HF solutions onto silicon wafers. / Parks, H. G.; Hiskey, J Brent; Yoneshige, K.

Materials Research Society Symposium Proceedings. ed. / Peter Borgesen; Klavs F. Jensen; Roger A. Pollak. Vol. 318 Publ by Materials Research Society, 1994. p. 245-256.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Parks, HG, Hiskey, JB & Yoneshige, K 1994, Mechanistic study of the deposition of metals from HF solutions onto silicon wafers. in P Borgesen, KF Jensen & RA Pollak (eds), Materials Research Society Symposium Proceedings. vol. 318, Publ by Materials Research Society, pp. 245-256, Proceedings of the Fall 1993 MRS Meeting, Boston, MA, USA, 11/29/93.
Parks HG, Hiskey JB, Yoneshige K. Mechanistic study of the deposition of metals from HF solutions onto silicon wafers. In Borgesen P, Jensen KF, Pollak RA, editors, Materials Research Society Symposium Proceedings. Vol. 318. Publ by Materials Research Society. 1994. p. 245-256
Parks, H. G. ; Hiskey, J Brent ; Yoneshige, K. / Mechanistic study of the deposition of metals from HF solutions onto silicon wafers. Materials Research Society Symposium Proceedings. editor / Peter Borgesen ; Klavs F. Jensen ; Roger A. Pollak. Vol. 318 Publ by Materials Research Society, 1994. pp. 245-256
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