Mechanistic study of the deposition of metals from HF solutions onto silicon wafers

H. G. Parks, J. B. Hiskey, K. Yoneshige

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Fingerprint Dive into the research topics of 'Mechanistic study of the deposition of metals from HF solutions onto silicon wafers'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science