Megasonic cleaning of blanket and patterned samples in carbonated ammonia solutions for enhanced particle removal and reduced feature damage

Research output: Contribution to journalArticle

13 Scopus citations

Abstract

An investigation of particle removal efficiency and feature damage has been conducted in NH4 OH/NH4 HCO3 cleaning solutions irradiated with megasonic energy. By adjusting the pH of the solution in the range of 8.2-8.5, high particle removal efficiency (PRE) was achieved while feature damage was reduced significantly. The sonoluminescence data collected from NH4 OH and NH4 OH/NH4 HCO 3 solutions indicate significant suppression of transient cavitation in alkaline solutions containing aqueous CO2.

Original languageEnglish (US)
Article number6549164
Pages (from-to)400-405
Number of pages6
JournalIEEE Transactions on Semiconductor Manufacturing
Volume26
Issue number3
DOIs
StatePublished - Aug 15 2013

Keywords

  • CO (aq.)
  • Megasonic cleaning
  • feature damage
  • particle removal efficiency (PRE)
  • sonoluminescence (SL)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Megasonic cleaning of blanket and patterned samples in carbonated ammonia solutions for enhanced particle removal and reduced feature damage'. Together they form a unique fingerprint.

  • Cite this