Megasonic cleaning of blanket and patterned samples in carbonated ammonia solutions for enhanced particle removal and reduced feature damage

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12 Citations (Scopus)

Abstract

An investigation of particle removal efficiency and feature damage has been conducted in NH4 OH/NH4 HCO3 cleaning solutions irradiated with megasonic energy. By adjusting the pH of the solution in the range of 8.2-8.5, high particle removal efficiency (PRE) was achieved while feature damage was reduced significantly. The sonoluminescence data collected from NH4 OH and NH4 OH/NH4 HCO 3 solutions indicate significant suppression of transient cavitation in alkaline solutions containing aqueous CO2.

Original languageEnglish (US)
Article number6549164
Pages (from-to)400-405
Number of pages6
JournalIEEE Transactions on Semiconductor Manufacturing
Volume26
Issue number3
DOIs
StatePublished - 2013

Fingerprint

blankets
Ammonia
cleaning
ammonia
Cleaning
damage
sonoluminescence
Sonoluminescence
cavitation flow
adjusting
Cavitation
retarding
aqueous solutions
energy

Keywords

  • CO (aq.)
  • feature damage
  • Megasonic cleaning
  • particle removal efficiency (PRE)
  • sonoluminescence (SL)

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

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abstract = "An investigation of particle removal efficiency and feature damage has been conducted in NH4 OH/NH4 HCO3 cleaning solutions irradiated with megasonic energy. By adjusting the pH of the solution in the range of 8.2-8.5, high particle removal efficiency (PRE) was achieved while feature damage was reduced significantly. The sonoluminescence data collected from NH4 OH and NH4 OH/NH4 HCO 3 solutions indicate significant suppression of transient cavitation in alkaline solutions containing aqueous CO2.",
keywords = "CO (aq.), feature damage, Megasonic cleaning, particle removal efficiency (PRE), sonoluminescence (SL)",
author = "Zhenxing Han and Keswani, {Manish K} and Srini Raghavan",
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AU - Keswani, Manish K

AU - Raghavan, Srini

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AB - An investigation of particle removal efficiency and feature damage has been conducted in NH4 OH/NH4 HCO3 cleaning solutions irradiated with megasonic energy. By adjusting the pH of the solution in the range of 8.2-8.5, high particle removal efficiency (PRE) was achieved while feature damage was reduced significantly. The sonoluminescence data collected from NH4 OH and NH4 OH/NH4 HCO 3 solutions indicate significant suppression of transient cavitation in alkaline solutions containing aqueous CO2.

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KW - sonoluminescence (SL)

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JF - IEEE Transactions on Semiconductor Manufacturing

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