MEMS actuator array as a neuro-physiological testing tool

Eniko T Enikov, K. V. Lazarov, G. R. Gonzales

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Tactile perception of complex symbols through tactile stimulation is an exciting application of a phenomenon known as tactile illusion (TI). Sensation of motion on the skin can be produced by a limited number of discrete mechanical actuators applying light pressure over the skin. This phenomenon can thus be used as a neurophysiological testing tool to determine central and peripheral nervous system injury as well as providing an additional human-machine communication channel. This paper describes the development of a 4×5 actuator array of individual vibrating pixels for fingertip tactile communication. The array is approximately one square centimeter and utilizes novel micro-clutch MEMS technology. The individual pixels are turned ON and OFF by pairs of microscopic thermal actuators, while the main vibration is generated by a vibrating piezo-electric plate. The physiological parameters required for inducing tactile illusion are described. The fabrication sequence for the thermal microactuators along with actuation results are also presented.

Original languageEnglish (US)
Title of host publication2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages337-340
Number of pages4
ISBN (Electronic)0780374800, 9780780374805
DOIs
StatePublished - 2002
Event2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Madison, United States
Duration: May 2 2002May 4 2002

Other

Other2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology
CountryUnited States
CityMadison
Period5/2/025/4/02

Keywords

  • piezo-actuators
  • SU8
  • tactile array
  • tactile illusion
  • Thermal actuators

ASJC Scopus subject areas

  • Biotechnology
  • Microbiology (medical)

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  • Cite this

    Enikov, E. T., Lazarov, K. V., & Gonzales, G. R. (2002). MEMS actuator array as a neuro-physiological testing tool. In 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings (pp. 337-340). [1002342] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MMB.2002.1002342