MEMS based single cell penetration force sensor

Eniko T Enikov, Bradley J. Nelson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

The rapid development of reproductive biology has created a need for quantifying penetration forces during artificial fertilization. It has been demonstrated that the success of such procedures heavily depends on the mechanics of penetration of the egg's zona and membrane. To quantify the forces during intracytoplasmic injections we have developed a MEMS based force sensor. Deep RIE and fusion bonding are used to fabricate a variable capacitance type sensor. It is designed to measure the penetration force during intracytoplasmic injection of egg cells as well as other applications in the 1-500 μmN force range. The sensor measures tri-axial forces using a system of flexible beams subjected to bending and torsion. The process is relatively simple and allows for easy modification of the force range. A penetration pipette tip is attached to the sensor body using a low temperature bonding technique. Calibration, sensitivity and initial experimental data is provided.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages40-46
Number of pages7
Volume3834
StatePublished - 1999
Externally publishedYes
EventProceedings of the 1999 Microbotics and Microassembly - Boston, MA, USA
Duration: Sep 21 1999Sep 22 1999

Other

OtherProceedings of the 1999 Microbotics and Microassembly
CityBoston, MA, USA
Period9/21/999/22/99

Fingerprint

microelectromechanical systems
MEMS
penetration
sensors
Sensors
cells
eggs
Reactive ion etching
Torsional stress
pipettes
Mechanics
Capacitance
injection
Fusion reactions
fertilization
Calibration
Membranes
biology
torsion
fusion

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Enikov, E. T., & Nelson, B. J. (1999). MEMS based single cell penetration force sensor. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3834, pp. 40-46). Society of Photo-Optical Instrumentation Engineers.

MEMS based single cell penetration force sensor. / Enikov, Eniko T; Nelson, Bradley J.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3834 Society of Photo-Optical Instrumentation Engineers, 1999. p. 40-46.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Enikov, ET & Nelson, BJ 1999, MEMS based single cell penetration force sensor. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 3834, Society of Photo-Optical Instrumentation Engineers, pp. 40-46, Proceedings of the 1999 Microbotics and Microassembly, Boston, MA, USA, 9/21/99.
Enikov ET, Nelson BJ. MEMS based single cell penetration force sensor. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3834. Society of Photo-Optical Instrumentation Engineers. 1999. p. 40-46
Enikov, Eniko T ; Nelson, Bradley J. / MEMS based single cell penetration force sensor. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3834 Society of Photo-Optical Instrumentation Engineers, 1999. pp. 40-46
@inproceedings{2a3fd2a259e0470b899c006850e160b9,
title = "MEMS based single cell penetration force sensor",
abstract = "The rapid development of reproductive biology has created a need for quantifying penetration forces during artificial fertilization. It has been demonstrated that the success of such procedures heavily depends on the mechanics of penetration of the egg's zona and membrane. To quantify the forces during intracytoplasmic injections we have developed a MEMS based force sensor. Deep RIE and fusion bonding are used to fabricate a variable capacitance type sensor. It is designed to measure the penetration force during intracytoplasmic injection of egg cells as well as other applications in the 1-500 μmN force range. The sensor measures tri-axial forces using a system of flexible beams subjected to bending and torsion. The process is relatively simple and allows for easy modification of the force range. A penetration pipette tip is attached to the sensor body using a low temperature bonding technique. Calibration, sensitivity and initial experimental data is provided.",
author = "Enikov, {Eniko T} and Nelson, {Bradley J.}",
year = "1999",
language = "English (US)",
volume = "3834",
pages = "40--46",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "Society of Photo-Optical Instrumentation Engineers",

}

TY - GEN

T1 - MEMS based single cell penetration force sensor

AU - Enikov, Eniko T

AU - Nelson, Bradley J.

PY - 1999

Y1 - 1999

N2 - The rapid development of reproductive biology has created a need for quantifying penetration forces during artificial fertilization. It has been demonstrated that the success of such procedures heavily depends on the mechanics of penetration of the egg's zona and membrane. To quantify the forces during intracytoplasmic injections we have developed a MEMS based force sensor. Deep RIE and fusion bonding are used to fabricate a variable capacitance type sensor. It is designed to measure the penetration force during intracytoplasmic injection of egg cells as well as other applications in the 1-500 μmN force range. The sensor measures tri-axial forces using a system of flexible beams subjected to bending and torsion. The process is relatively simple and allows for easy modification of the force range. A penetration pipette tip is attached to the sensor body using a low temperature bonding technique. Calibration, sensitivity and initial experimental data is provided.

AB - The rapid development of reproductive biology has created a need for quantifying penetration forces during artificial fertilization. It has been demonstrated that the success of such procedures heavily depends on the mechanics of penetration of the egg's zona and membrane. To quantify the forces during intracytoplasmic injections we have developed a MEMS based force sensor. Deep RIE and fusion bonding are used to fabricate a variable capacitance type sensor. It is designed to measure the penetration force during intracytoplasmic injection of egg cells as well as other applications in the 1-500 μmN force range. The sensor measures tri-axial forces using a system of flexible beams subjected to bending and torsion. The process is relatively simple and allows for easy modification of the force range. A penetration pipette tip is attached to the sensor body using a low temperature bonding technique. Calibration, sensitivity and initial experimental data is provided.

UR - http://www.scopus.com/inward/record.url?scp=0033339895&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033339895&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0033339895

VL - 3834

SP - 40

EP - 46

BT - Proceedings of SPIE - The International Society for Optical Engineering

PB - Society of Photo-Optical Instrumentation Engineers

ER -