MEMS optomechanical accelerometry standards

Felipe Guzmán Cervantes, Yiliang Bao, Jason J. Gorman, John R. Lawall, Jacob M. Taylor, Thomas W. LeBrun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationProceedings - ASPE 2015 Summer Topical Meeting
Subtitle of host publicationPrecision Interferometric Metrology
PublisherAmerican Society for Precision Engineering, ASPE
Pages56-59
Number of pages4
ISBN (Electronic)9781887706681
StatePublished - Jan 1 2015
Externally publishedYes
Event5th ASPE Topical Meeting on Precision Interferometric Metrology - Golden, United States
Duration: Jul 8 2015Jul 10 2015

Publication series

NameProceedings - ASPE 2015 Summer Topical Meeting: Precision Interferometric Metrology

Conference

Conference5th ASPE Topical Meeting on Precision Interferometric Metrology
CountryUnited States
CityGolden
Period7/8/157/10/15

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Cervantes, F. G., Bao, Y., Gorman, J. J., Lawall, J. R., Taylor, J. M., & LeBrun, T. W. (2015). MEMS optomechanical accelerometry standards. In Proceedings - ASPE 2015 Summer Topical Meeting: Precision Interferometric Metrology (pp. 56-59). (Proceedings - ASPE 2015 Summer Topical Meeting: Precision Interferometric Metrology). American Society for Precision Engineering, ASPE.