Mesoscale thin film actuator for promoting fluid motion in microfluidic and nanofluidic channels

Daniel J. Sadler, Gaurav Singh, Frederic Zenhausern, Ravi F. Saraf

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Microfluidic and nanofluidic devices often require actuators to induce fluid motion for applications such as pumping and mixing in small channels. Mixing, for instance, is important in systems where channel or chamber dimensions are on the order of 100 μm or larger as diffusive mixing can be prohibitively slow at these dimensions. In this work, a new mesoscale thin film polymer electromechanical actuator is introduced for use in the aforementioned applications. Unlike inorganic piezoelectric actuators, the devices based on these materials will be relatively easy to fabricate involving no high temperature processing, crystal growth, or microlithography. Fabrication of an array of actuators is simply achieved by spin casting the polymer over top of lithographically patterned gold electrodes at a thickness of less than 50 nm. This simple process enables a microfluidic device based on these actuators to be an integral part of a microfluidic channel rather than a separate unit operation. Depending on the application, the actuator array can be designed and controlled for random perturbations of the fluid flow field as required for mixing or for systematic actuation as required for pumping. These thin-film mesoscale actuators have been characterized and show extremely favorable properties such as a high electrostrictive response (compared to none in the bulk) and a frequency response of up to 50 kHz. In addition, finite element simulations show feasibility of these actuators for use in microfluidic mixing applications.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsD.A. LaVan, A.A. Ayon, T.E. Buchheit, M.J. Madou
Pages3-8
Number of pages6
Volume741
StatePublished - 2002
Externally publishedYes
EventNano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines - Boston, MA, United States
Duration: Dec 2 2002Dec 4 2002

Other

OtherNano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines
CountryUnited States
CityBoston, MA
Period12/2/0212/4/02

Fingerprint

Nanofluidics
Microfluidics
Actuators
Thin films
Fluids
Polymers
Electromechanical actuators
Piezoelectric actuators
Crystallization
Crystal growth
Gold
Lithography
Frequency response
Flow of fluids
Flow fields
Casting
Fabrication
Electrodes
Processing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Sadler, D. J., Singh, G., Zenhausern, F., & Saraf, R. F. (2002). Mesoscale thin film actuator for promoting fluid motion in microfluidic and nanofluidic channels. In D. A. LaVan, A. A. Ayon, T. E. Buchheit, & M. J. Madou (Eds.), Materials Research Society Symposium - Proceedings (Vol. 741, pp. 3-8)

Mesoscale thin film actuator for promoting fluid motion in microfluidic and nanofluidic channels. / Sadler, Daniel J.; Singh, Gaurav; Zenhausern, Frederic; Saraf, Ravi F.

Materials Research Society Symposium - Proceedings. ed. / D.A. LaVan; A.A. Ayon; T.E. Buchheit; M.J. Madou. Vol. 741 2002. p. 3-8.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sadler, DJ, Singh, G, Zenhausern, F & Saraf, RF 2002, Mesoscale thin film actuator for promoting fluid motion in microfluidic and nanofluidic channels. in DA LaVan, AA Ayon, TE Buchheit & MJ Madou (eds), Materials Research Society Symposium - Proceedings. vol. 741, pp. 3-8, Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines, Boston, MA, United States, 12/2/02.
Sadler DJ, Singh G, Zenhausern F, Saraf RF. Mesoscale thin film actuator for promoting fluid motion in microfluidic and nanofluidic channels. In LaVan DA, Ayon AA, Buchheit TE, Madou MJ, editors, Materials Research Society Symposium - Proceedings. Vol. 741. 2002. p. 3-8
Sadler, Daniel J. ; Singh, Gaurav ; Zenhausern, Frederic ; Saraf, Ravi F. / Mesoscale thin film actuator for promoting fluid motion in microfluidic and nanofluidic channels. Materials Research Society Symposium - Proceedings. editor / D.A. LaVan ; A.A. Ayon ; T.E. Buchheit ; M.J. Madou. Vol. 741 2002. pp. 3-8
@inproceedings{c6faa12ebe644bcdbae41f0fdfb01a92,
title = "Mesoscale thin film actuator for promoting fluid motion in microfluidic and nanofluidic channels",
abstract = "Microfluidic and nanofluidic devices often require actuators to induce fluid motion for applications such as pumping and mixing in small channels. Mixing, for instance, is important in systems where channel or chamber dimensions are on the order of 100 μm or larger as diffusive mixing can be prohibitively slow at these dimensions. In this work, a new mesoscale thin film polymer electromechanical actuator is introduced for use in the aforementioned applications. Unlike inorganic piezoelectric actuators, the devices based on these materials will be relatively easy to fabricate involving no high temperature processing, crystal growth, or microlithography. Fabrication of an array of actuators is simply achieved by spin casting the polymer over top of lithographically patterned gold electrodes at a thickness of less than 50 nm. This simple process enables a microfluidic device based on these actuators to be an integral part of a microfluidic channel rather than a separate unit operation. Depending on the application, the actuator array can be designed and controlled for random perturbations of the fluid flow field as required for mixing or for systematic actuation as required for pumping. These thin-film mesoscale actuators have been characterized and show extremely favorable properties such as a high electrostrictive response (compared to none in the bulk) and a frequency response of up to 50 kHz. In addition, finite element simulations show feasibility of these actuators for use in microfluidic mixing applications.",
author = "Sadler, {Daniel J.} and Gaurav Singh and Frederic Zenhausern and Saraf, {Ravi F.}",
year = "2002",
language = "English (US)",
volume = "741",
pages = "3--8",
editor = "D.A. LaVan and A.A. Ayon and T.E. Buchheit and M.J. Madou",
booktitle = "Materials Research Society Symposium - Proceedings",

}

TY - GEN

T1 - Mesoscale thin film actuator for promoting fluid motion in microfluidic and nanofluidic channels

AU - Sadler, Daniel J.

AU - Singh, Gaurav

AU - Zenhausern, Frederic

AU - Saraf, Ravi F.

PY - 2002

Y1 - 2002

N2 - Microfluidic and nanofluidic devices often require actuators to induce fluid motion for applications such as pumping and mixing in small channels. Mixing, for instance, is important in systems where channel or chamber dimensions are on the order of 100 μm or larger as diffusive mixing can be prohibitively slow at these dimensions. In this work, a new mesoscale thin film polymer electromechanical actuator is introduced for use in the aforementioned applications. Unlike inorganic piezoelectric actuators, the devices based on these materials will be relatively easy to fabricate involving no high temperature processing, crystal growth, or microlithography. Fabrication of an array of actuators is simply achieved by spin casting the polymer over top of lithographically patterned gold electrodes at a thickness of less than 50 nm. This simple process enables a microfluidic device based on these actuators to be an integral part of a microfluidic channel rather than a separate unit operation. Depending on the application, the actuator array can be designed and controlled for random perturbations of the fluid flow field as required for mixing or for systematic actuation as required for pumping. These thin-film mesoscale actuators have been characterized and show extremely favorable properties such as a high electrostrictive response (compared to none in the bulk) and a frequency response of up to 50 kHz. In addition, finite element simulations show feasibility of these actuators for use in microfluidic mixing applications.

AB - Microfluidic and nanofluidic devices often require actuators to induce fluid motion for applications such as pumping and mixing in small channels. Mixing, for instance, is important in systems where channel or chamber dimensions are on the order of 100 μm or larger as diffusive mixing can be prohibitively slow at these dimensions. In this work, a new mesoscale thin film polymer electromechanical actuator is introduced for use in the aforementioned applications. Unlike inorganic piezoelectric actuators, the devices based on these materials will be relatively easy to fabricate involving no high temperature processing, crystal growth, or microlithography. Fabrication of an array of actuators is simply achieved by spin casting the polymer over top of lithographically patterned gold electrodes at a thickness of less than 50 nm. This simple process enables a microfluidic device based on these actuators to be an integral part of a microfluidic channel rather than a separate unit operation. Depending on the application, the actuator array can be designed and controlled for random perturbations of the fluid flow field as required for mixing or for systematic actuation as required for pumping. These thin-film mesoscale actuators have been characterized and show extremely favorable properties such as a high electrostrictive response (compared to none in the bulk) and a frequency response of up to 50 kHz. In addition, finite element simulations show feasibility of these actuators for use in microfluidic mixing applications.

UR - http://www.scopus.com/inward/record.url?scp=0042510632&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0042510632&partnerID=8YFLogxK

M3 - Conference contribution

VL - 741

SP - 3

EP - 8

BT - Materials Research Society Symposium - Proceedings

A2 - LaVan, D.A.

A2 - Ayon, A.A.

A2 - Buchheit, T.E.

A2 - Madou, M.J.

ER -