Metal-induced laterally crystallized polycrystalline silicon for integrated sensor applications

Mingxiang Wang, Zhiguo Meng, Yitshak Zohar, Man Wong

Research output: Contribution to journalArticle

17 Scopus citations

Abstract

A novel metal-induced lateral crystallization (MILC) technique, involving a low temperature crystallization step followed by a high temperature recrystallization step, has been applied to the formation of polycrystalline silicon (poly-Si) with enhanced material characteristics. A range of devices, including piezo-resistors, thermisters, resistors and thin- film transistors, has been fabricated both on MILC and regular low-pressure chemical vapor deposited (LPCVD) poly-Si. Compared to the latter, MILC poly-Si leads to much improved device performance. The piezo-resistive gauge factor of MILC poly-Si is at least double that of LPCVD poly-Si, with a maximum value of 60 measured. Higher mobility, steeper subthreshold slope, lower threshold voltage, and higher on-off current ratio have been obtained for thin-film transistors realized on MILC poly-Si that those realized on LPCVD poly-Si. A variety of sensing and electronic devices based on MILC poly-Si can be simultaneously realized, thus making MILC an enabling technology for integrated silicon sensor applications.

Original languageEnglish (US)
Pages (from-to)794-800
Number of pages7
JournalIEEE Transactions on Electron Devices
Volume48
Issue number4
DOIs
StatePublished - Apr 1 2001
Externally publishedYes

Keywords

  • Metal-induced crystallization
  • Piezo-resistance
  • Polycrystalline silicon
  • Sensors

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Metal-induced laterally crystallized polycrystalline silicon for integrated sensor applications'. Together they form a unique fingerprint.

  • Cite this