Metal-induced laterally crystallized polycrystalline silicon for integrated sensor applications

Mingxiang Wang, Zhiguo Meng, Yitshak Zohar, Man Wong

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

A novel metal-induced lateral crystallization (MILC) technique, involving a low temperature crystallization step followed by a high temperature recrystallization step, has been applied to the formation of polycrystalline silicon (poly-Si) with enhanced material characteristics. A range of devices, including piezo-resistors, thermisters, resistors and thin- film transistors, has been fabricated both on MILC and regular low-pressure chemical vapor deposited (LPCVD) poly-Si. Compared to the latter, MILC poly-Si leads to much improved device performance. The piezo-resistive gauge factor of MILC poly-Si is at least double that of LPCVD poly-Si, with a maximum value of 60 measured. Higher mobility, steeper subthreshold slope, lower threshold voltage, and higher on-off current ratio have been obtained for thin-film transistors realized on MILC poly-Si that those realized on LPCVD poly-Si. A variety of sensing and electronic devices based on MILC poly-Si can be simultaneously realized, thus making MILC an enabling technology for integrated silicon sensor applications.

Original languageEnglish (US)
Pages (from-to)794-800
Number of pages7
JournalIEEE Transactions on Electron Devices
Volume48
Issue number4
DOIs
StatePublished - Apr 2001
Externally publishedYes

Fingerprint

Crystallization
Polysilicon
Metals
crystallization
sensors
Sensors
silicon
metals
low pressure
Vapors
Thin film transistors
vapors
resistors
Resistors
transistors
Silicon sensors
thin films
Threshold voltage
threshold voltage
low voltage

Keywords

  • Metal-induced crystallization
  • Piezo-resistance
  • Polycrystalline silicon
  • Sensors

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)

Cite this

Metal-induced laterally crystallized polycrystalline silicon for integrated sensor applications. / Wang, Mingxiang; Meng, Zhiguo; Zohar, Yitshak; Wong, Man.

In: IEEE Transactions on Electron Devices, Vol. 48, No. 4, 04.2001, p. 794-800.

Research output: Contribution to journalArticle

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