We present a simple method to assess surface figure error tolerances of optical systems. From a statistical analysis, an empirical equation is obtained for estimating the overall wavefront error contribution from surface figure error tolerance assigned on each surface. The same equation can be used to evaluate the inverse sensitivity for surface figure error specification given an error budget.
- Inverse sensitivity
- RSS rule
- Surface figure error
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics