Micro- and Nano-assembly and Manipulation Techniques for MEMS

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

This paper presents a review of the most commonly used techniques for the assembly of micro-systems. Following a brief overview of the dominant forces working at this scale, the operation and design of mechanical, electrostatic, and magnetic micro-grippers is presented. The use of electrostatic forces is further described in the context of nano-assembly, where sub-micron-sized charged spots are used as the anchoring sites for nano-particles.

Original languageEnglish (US)
Title of host publicationCISM International Centre for Mechanical Sciences, Courses and Lectures
PublisherSpringer International Publishing
Pages135-156
Number of pages22
DOIs
StatePublished - Jan 1 2006

Publication series

NameCISM International Centre for Mechanical Sciences, Courses and Lectures
Volume478
ISSN (Print)0254-1971
ISSN (Electronic)2309-3706

Keywords

  • Dielectric Layer
  • Filling Ratio
  • Manipulation Technique
  • Shape Memory Alloy
  • Uterine Artery Embolization

ASJC Scopus subject areas

  • Mechanical Engineering
  • Mechanics of Materials
  • Computer Science Applications
  • Modeling and Simulation

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  • Cite this

    Enikov, E. T. (2006). Micro- and Nano-assembly and Manipulation Techniques for MEMS. In CISM International Centre for Mechanical Sciences, Courses and Lectures (pp. 135-156). (CISM International Centre for Mechanical Sciences, Courses and Lectures; Vol. 478). Springer International Publishing. https://doi.org/10.1007/978-3-211-48549-1_7