Micro- and Nano-assembly and Manipulation Techniques for MEMS

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

This paper presents a review of the most commonly used techniques for the assembly of micro-systems. Following a brief overview of the dominant forces working at this scale, the operation and design of mechanical, electrostatic, and magnetic micro-grippers is presented. The use of electrostatic forces is further described in the context of nano-assembly, where sub-micron-sized charged spots are used as the anchoring sites for nano-particles.

Original languageEnglish (US)
Title of host publicationCISM International Centre for Mechanical Sciences, Courses and Lectures
PublisherSpringer International Publishing
Pages135-156
Number of pages22
DOIs
StatePublished - Jan 1 2006

Publication series

NameCISM International Centre for Mechanical Sciences, Courses and Lectures
Volume478
ISSN (Print)0254-1971
ISSN (Electronic)2309-3706

Fingerprint

Micro-electro-mechanical Systems
MEMS
Manipulation
Electrostatic Force
Microsystems
Grippers
Electrostatic force
Electrostatics
Nanoparticles
Design
Review
Context

Keywords

  • Dielectric Layer
  • Filling Ratio
  • Manipulation Technique
  • Shape Memory Alloy
  • Uterine Artery Embolization

ASJC Scopus subject areas

  • Mechanical Engineering
  • Mechanics of Materials
  • Computer Science Applications
  • Modeling and Simulation

Cite this

Enikov, E. T. (2006). Micro- and Nano-assembly and Manipulation Techniques for MEMS. In CISM International Centre for Mechanical Sciences, Courses and Lectures (pp. 135-156). (CISM International Centre for Mechanical Sciences, Courses and Lectures; Vol. 478). Springer International Publishing. https://doi.org/10.1007/978-3-211-48549-1_7

Micro- and Nano-assembly and Manipulation Techniques for MEMS. / Enikov, Eniko T.

CISM International Centre for Mechanical Sciences, Courses and Lectures. Springer International Publishing, 2006. p. 135-156 (CISM International Centre for Mechanical Sciences, Courses and Lectures; Vol. 478).

Research output: Chapter in Book/Report/Conference proceedingChapter

Enikov, ET 2006, Micro- and Nano-assembly and Manipulation Techniques for MEMS. in CISM International Centre for Mechanical Sciences, Courses and Lectures. CISM International Centre for Mechanical Sciences, Courses and Lectures, vol. 478, Springer International Publishing, pp. 135-156. https://doi.org/10.1007/978-3-211-48549-1_7
Enikov ET. Micro- and Nano-assembly and Manipulation Techniques for MEMS. In CISM International Centre for Mechanical Sciences, Courses and Lectures. Springer International Publishing. 2006. p. 135-156. (CISM International Centre for Mechanical Sciences, Courses and Lectures). https://doi.org/10.1007/978-3-211-48549-1_7
Enikov, Eniko T. / Micro- and Nano-assembly and Manipulation Techniques for MEMS. CISM International Centre for Mechanical Sciences, Courses and Lectures. Springer International Publishing, 2006. pp. 135-156 (CISM International Centre for Mechanical Sciences, Courses and Lectures).
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