Micro-mechanical switch array for meso-scale actuation

Eniko T Enikov, Kalin V. Lazarov

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Traditional micro-electro mechanical systems (MEMS) actuators have limited stroke and force characteristics. This paper describes the development of a hybrid actuation solution, which utilizes a micro-machined actuator array to provide switching of the mechanical motion of a larger meso-scale piezo-electric actuator. One motivating application of this technology is the development of a tactile display, where discrete mechanical actuators apply vibratory excitation at discrete locations on the skin. Specifically, this paper describes the development, fabrication, and characterization of a 4 × 5 micro-actuator array of individual vibrating pixels for fingertip tactile communication. The individual pixels are turned on and off by pairs of microscopic thermal actuators, while the main vibration is generated by a vibrating piezo-electric plate. The fabrication sequence and actuation performance of the array are also presented.

Original languageEnglish (US)
Pages (from-to)282-293
Number of pages12
JournalSensors and Actuators, A: Physical
Volume121
Issue number1
DOIs
StatePublished - May 31 2005

Fingerprint

actuation
Actuators
switches
actuators
Switches
Mechanical actuators
Pixels
Fabrication
pixels
Piezoelectric actuators
fabrication
piezoelectric actuators
Skin
strokes
Display devices
communication
Communication
vibration
excitation

Keywords

  • Meso-scale system
  • Piezo-actuators
  • Tactile display
  • Thermal actuators

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

Micro-mechanical switch array for meso-scale actuation. / Enikov, Eniko T; Lazarov, Kalin V.

In: Sensors and Actuators, A: Physical, Vol. 121, No. 1, 31.05.2005, p. 282-293.

Research output: Contribution to journalArticle

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