Microassembly experiments with transparent electrostatic gripper under optical and vision-based control

Eniko T Enikov, Lyubomir L. Minkov, Scott Clark

Research output: Contribution to journalArticle

34 Citations (Scopus)

Abstract

This paper describes the assembly experiments conducted with a novel miniature assembly cell for microelectro-mechanical systems. The cell utilizes a novel transparent electro-static gripper and uses several disparate sensing modalities for position control: computer vision for part alignment with respect to the gripper, a fiber-coupled laser, and a position-sensitive detector for part to assembly alignment. The assembly experiments performed indicate that the gripping force and stage positioning accuracy of the gripper are sufficient for insertion of micromachined parts into slots etched in silicon substrates. Details of the cell operation, the control algorithm used, and their limitations are also provided. Potential applications of the developed assembly cell are assembly of miniature optical systems, integration of optoelectronics, such as laser diodes with CMOS, and epitaxial lift-off of thin films used in optoelectronic devices.

Original languageEnglish (US)
Pages (from-to)1005-1012
Number of pages8
JournalIEEE Transactions on Industrial Electronics
Volume52
Issue number4
DOIs
StatePublished - Aug 2005

Fingerprint

Grippers
Electrostatics
assembly
electrostatics
Experiments
cells
Optoelectronic devices
alignment
Optical fiber coupling
systems integration
Position control
computer vision
optoelectronic devices
slots
Optical systems
Computer vision
positioning
Semiconductor lasers
insertion
CMOS

Keywords

  • Electrostatic gripping
  • Microassembly
  • Visual servoing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation

Cite this

Microassembly experiments with transparent electrostatic gripper under optical and vision-based control. / Enikov, Eniko T; Minkov, Lyubomir L.; Clark, Scott.

In: IEEE Transactions on Industrial Electronics, Vol. 52, No. 4, 08.2005, p. 1005-1012.

Research output: Contribution to journalArticle

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