Microchannel heat sinks

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

The last decade has witnessed impressive progress in micromachining technology enabling the fabrication of micron-sized mechanical devices, which have become more prevalent in both commercial applications and scientific research. These micromachines have had a major impact on many disciplines, including biology, chemistry, medicine, optics, and aerospace, mechanical, and electrical engineering. This emerging field not only provides miniature transducers for sensing and actuation in a domain that we could not examine in the past but also allows us to venture into research areas where the surface effects dominate most of the physical phenomena [Ho and Tai, 1998]. Fundamental heat-transfer problems posed by the development and processing of advanced integrated circuits (ICs) and microelectromechanical systems (MEMS) are becoming a major consideration in the design and application of such systems. The demands on heat-removal and temperature-control functions in modern devices that have highly transient thermal loads require an approach providing high cooling rates and uniform temperature distributions.

Original languageEnglish (US)
Title of host publicationMEMS
Subtitle of host publicationApplications
PublisherCRC Press
Pages12-1-12-29
ISBN (Electronic)9781420036558
ISBN (Print)9780849391392
StatePublished - Jan 1 2005

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Zohar, Y. (2005). Microchannel heat sinks. In MEMS: Applications (pp. 12-1-12-29). CRC Press.