Microelectromechanical systems

Yaolin Wang, Yitshak Zohar, Man Wang

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

A survey of current international research on MEMS is presented. The principal technology involved in MEMS and its industrial application are introduced. The research of MEMS conducted by leading international institutes was analyzed and some suggestions are proposed for future development of MEMS technology in China.

Original languageEnglish (US)
Pages (from-to)37-42
Number of pages6
JournalTien Tzu Hsueh Pao/Acta Electronica Sinica
Volume23
Issue number10
StatePublished - Oct 1 1995
Externally publishedYes

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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