Microfabricated quadrupole ion trap for mass spectrometer applications

S. Pau, C. S. Pai, Y. L. Low, J. Moxom, P. T.A. Reilly, W. B. Whitten, J. M. Ramsey

Research output: Contribution to journalArticlepeer-review

86 Scopus citations

Abstract

An array of miniaturized cylindrical quadrupole ion traps, with a radius of 20 μm, is fabricated using silicon micromachining using phosphorus doped polysilicon and silicon dioxide for the purpose of creating a mass spectrometer on a chip. We have operated the array for mass-selective ion ejection and mass analysis using Xe ions at a pressure of 10-4Torr. The scaling rules for the ion trap in relation to operating pressure, voltage, and frequency are examined.

Original languageEnglish (US)
Article number120801
JournalPhysical review letters
Volume96
Issue number12
StatePublished - Jan 1 2006

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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