Micromachined 50-um x 250-um silicon torsional mirror arrays for optical signal processing

Pin Ju Hsiang, Augusto Garcia-Valenzuela, Mark A Neifeld, Massood Tabib-Azar

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

We propose an array of electrostatically driven torsional mirrors for optical signal processing. This 10-element device is 1-dimensional with pixels of 50 μm × 250 μm. The device is basically a hybrid integrated optical device which is fabricated in silicon and can be integrated with photodetectors and processing electronics to create elements of the so-called 'smart pixel' class of spatial light modulators. This class of devices will find application in many areas of optical processing including optical interconnects, optical switching, optical image analysis and optical neural networks. We discuss the design and fabrication of mirror arrays and electrode strips that are used to actuate them. The resonant frequency and deflection angle v.s. applied voltage of the fabricated devices are measured and compared with theoretical predictions.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherPubl by Int Soc for Optical Engineering
Pages190-198
Number of pages9
Volume1793
ISBN (Print)0819409723
StatePublished - 1993
Externally publishedYes
EventProceedings of the First Conference on Integrated Optics and Microstructure - Boston, MA, USA
Duration: Sep 8 1992Sep 9 1992

Other

OtherProceedings of the First Conference on Integrated Optics and Microstructure
CityBoston, MA, USA
Period9/8/929/9/92

Fingerprint

Optical signal processing
optical communication
signal processing
Mirrors
Pixels
mirrors
Silicon
Optical interconnects
silicon
Processing
Optical devices
Photodetectors
Image analysis
Natural frequencies
Electronic equipment
Neural networks
Fabrication
Electrodes
pixels
Electric potential

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Hsiang, P. J., Garcia-Valenzuela, A., Neifeld, M. A., & Tabib-Azar, M. (1993). Micromachined 50-um x 250-um silicon torsional mirror arrays for optical signal processing. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 1793, pp. 190-198). Publ by Int Soc for Optical Engineering.

Micromachined 50-um x 250-um silicon torsional mirror arrays for optical signal processing. / Hsiang, Pin Ju; Garcia-Valenzuela, Augusto; Neifeld, Mark A; Tabib-Azar, Massood.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 1793 Publ by Int Soc for Optical Engineering, 1993. p. 190-198.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hsiang, PJ, Garcia-Valenzuela, A, Neifeld, MA & Tabib-Azar, M 1993, Micromachined 50-um x 250-um silicon torsional mirror arrays for optical signal processing. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 1793, Publ by Int Soc for Optical Engineering, pp. 190-198, Proceedings of the First Conference on Integrated Optics and Microstructure, Boston, MA, USA, 9/8/92.
Hsiang PJ, Garcia-Valenzuela A, Neifeld MA, Tabib-Azar M. Micromachined 50-um x 250-um silicon torsional mirror arrays for optical signal processing. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 1793. Publ by Int Soc for Optical Engineering. 1993. p. 190-198
Hsiang, Pin Ju ; Garcia-Valenzuela, Augusto ; Neifeld, Mark A ; Tabib-Azar, Massood. / Micromachined 50-um x 250-um silicon torsional mirror arrays for optical signal processing. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 1793 Publ by Int Soc for Optical Engineering, 1993. pp. 190-198
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