Micromachined polycrystalline thin film temperature sensors

Linan Jiang, Man Wong, Yitshak Zohar

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

Polycrystalline thin films based on two elemental semiconducting materials, Si and Ge, have been utilized to fabricate microthermistors. The thermistors are designed in a heavy-light-heavy doping concentration arrangement. The design, fabrication, analysis and characterization of a variety of thermistors under different doping schemes is described. Finally, the operation of the thermistors in self-heating operation is discussed. The results provide a systematic framework for the application of semiconducting microthermoresistors.

Original languageEnglish (US)
Pages (from-to)653-664
Number of pages12
JournalMeasurement Science and Technology
Volume10
Issue number8
DOIs
StatePublished - Aug 1999
Externally publishedYes

Fingerprint

Thermistor
Thermistors
thermistors
Temperature Sensor
temperature sensors
Temperature sensors
Thin Films
Thin films
thin films
Doping (additives)
Heating
Arrangement
Fabrication
fabrication
heating

Keywords

  • Integrated microsystems
  • Polycrystalline semiconductors
  • Temperature microsensors
  • Thermoresistors

ASJC Scopus subject areas

  • Polymers and Plastics
  • Ceramics and Composites
  • Materials Science (miscellaneous)

Cite this

Micromachined polycrystalline thin film temperature sensors. / Jiang, Linan; Wong, Man; Zohar, Yitshak.

In: Measurement Science and Technology, Vol. 10, No. 8, 08.1999, p. 653-664.

Research output: Contribution to journalArticle

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