Micromachined polycrystalline thin film temperature sensors

Linan Jiang, Man Wong, Yitshak Zohar

30 Scopus citations
Original languageEnglish (US)
Pages (from-to)653-664
Number of pages12
JournalMeasurement Science and Technology
Volume10
Issue number8
DOIs
Publication statusPublished - Aug 1999
Externally publishedYes

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