Micromachined polycrystalline thin film temperature sensors

Linan Jiang, Man Wong, Yitshak Zohar

Research output: Contribution to journalArticle

30 Scopus citations

Abstract

Polycrystalline thin films based on two elemental semiconducting materials, Si and Ge, have been utilized to fabricate microthermistors. The thermistors are designed in a heavy-light-heavy doping concentration arrangement. The design, fabrication, analysis and characterization of a variety of thermistors under different doping schemes is described. Finally, the operation of the thermistors in self-heating operation is discussed. The results provide a systematic framework for the application of semiconducting microthermoresistors.

Original languageEnglish (US)
Pages (from-to)653-664
Number of pages12
JournalMeasurement Science and Technology
Volume10
Issue number8
DOIs
StatePublished - Aug 1999
Externally publishedYes

Keywords

  • Integrated microsystems
  • Polycrystalline semiconductors
  • Temperature microsensors
  • Thermoresistors

ASJC Scopus subject areas

  • Instrumentation
  • Engineering (miscellaneous)
  • Applied Mathematics

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