Micromachining of borosilicate glass surfaces using femtosecond higher-order Bessel beams

Weibo Cheng, Pavel G Polynkin

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

We report experimental results on micromachining of borosilicate glass slides with femtosecond higher-order Bessel beams. Transverse intensity profiles of these beams comprise concentric rings that are maintained over extended linear focus zones, facilitating machining geometries with large working distances and high aspect ratios. Both single-shot and multi-shot front-surface machining and multi-shot back-surface processing are experimentally investigated. Material removal in the latter case is furnished through the immersion of the back side of the glass slide in water. Under certain conditions, we observe evidence of self-focusing and azimuthal breakup of the initially smooth ring intensity features of the beams near the glass-water interface. These beam dynamics result in the formation of beaded ring features on the back surface of the glass slide. In the case of multi-shot front-surface machining, pillar-like structures can be fabricated.

Original languageEnglish (US)
Pages (from-to)C48-C52
JournalJournal of the Optical Society of America B: Optical Physics
Volume31
Issue number11
DOIs
StatePublished - Nov 1 2014

Fingerprint

borosilicate glass
micromachining
machining
shot
chutes
glass
rings
self focusing
high aspect ratio
water
submerging
profiles
geometry

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Statistical and Nonlinear Physics

Cite this

Micromachining of borosilicate glass surfaces using femtosecond higher-order Bessel beams. / Cheng, Weibo; Polynkin, Pavel G.

In: Journal of the Optical Society of America B: Optical Physics, Vol. 31, No. 11, 01.11.2014, p. C48-C52.

Research output: Contribution to journalArticle

@article{4265e2b8398a476290d8f76f71eb6eae,
title = "Micromachining of borosilicate glass surfaces using femtosecond higher-order Bessel beams",
abstract = "We report experimental results on micromachining of borosilicate glass slides with femtosecond higher-order Bessel beams. Transverse intensity profiles of these beams comprise concentric rings that are maintained over extended linear focus zones, facilitating machining geometries with large working distances and high aspect ratios. Both single-shot and multi-shot front-surface machining and multi-shot back-surface processing are experimentally investigated. Material removal in the latter case is furnished through the immersion of the back side of the glass slide in water. Under certain conditions, we observe evidence of self-focusing and azimuthal breakup of the initially smooth ring intensity features of the beams near the glass-water interface. These beam dynamics result in the formation of beaded ring features on the back surface of the glass slide. In the case of multi-shot front-surface machining, pillar-like structures can be fabricated.",
author = "Weibo Cheng and Polynkin, {Pavel G}",
year = "2014",
month = "11",
day = "1",
doi = "10.1364/JOSAB.31.000C48",
language = "English (US)",
volume = "31",
pages = "C48--C52",
journal = "Journal of the Optical Society of America B: Optical Physics",
issn = "0740-3224",
publisher = "The Optical Society",
number = "11",

}

TY - JOUR

T1 - Micromachining of borosilicate glass surfaces using femtosecond higher-order Bessel beams

AU - Cheng, Weibo

AU - Polynkin, Pavel G

PY - 2014/11/1

Y1 - 2014/11/1

N2 - We report experimental results on micromachining of borosilicate glass slides with femtosecond higher-order Bessel beams. Transverse intensity profiles of these beams comprise concentric rings that are maintained over extended linear focus zones, facilitating machining geometries with large working distances and high aspect ratios. Both single-shot and multi-shot front-surface machining and multi-shot back-surface processing are experimentally investigated. Material removal in the latter case is furnished through the immersion of the back side of the glass slide in water. Under certain conditions, we observe evidence of self-focusing and azimuthal breakup of the initially smooth ring intensity features of the beams near the glass-water interface. These beam dynamics result in the formation of beaded ring features on the back surface of the glass slide. In the case of multi-shot front-surface machining, pillar-like structures can be fabricated.

AB - We report experimental results on micromachining of borosilicate glass slides with femtosecond higher-order Bessel beams. Transverse intensity profiles of these beams comprise concentric rings that are maintained over extended linear focus zones, facilitating machining geometries with large working distances and high aspect ratios. Both single-shot and multi-shot front-surface machining and multi-shot back-surface processing are experimentally investigated. Material removal in the latter case is furnished through the immersion of the back side of the glass slide in water. Under certain conditions, we observe evidence of self-focusing and azimuthal breakup of the initially smooth ring intensity features of the beams near the glass-water interface. These beam dynamics result in the formation of beaded ring features on the back surface of the glass slide. In the case of multi-shot front-surface machining, pillar-like structures can be fabricated.

UR - http://www.scopus.com/inward/record.url?scp=84911050742&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84911050742&partnerID=8YFLogxK

U2 - 10.1364/JOSAB.31.000C48

DO - 10.1364/JOSAB.31.000C48

M3 - Article

AN - SCOPUS:84911050742

VL - 31

SP - C48-C52

JO - Journal of the Optical Society of America B: Optical Physics

JF - Journal of the Optical Society of America B: Optical Physics

SN - 0740-3224

IS - 11

ER -