Microplasma devices fabricated in silicon, ceramic, and metal/polymer structures: Arrays, emitters and photodetectors

J. G. Eden, S. J. Park, N. P. Ostrom, S. T. McCain, C. J. Wagner, B. A. Vojak, J. Chen, C. Liu, P. Von Allmen, Frederic Zenhausern, D. J. Sadler, C. Jensen, D. L. Wilcox, J. J. Ewing

Research output: Contribution to journalArticle

101 Citations (Scopus)

Abstract

Recent advances in the development of microplasma devices fabricated in a variety of materials systems (Si, ceramic multilayers, and metal/polymer structures) and configurations are reviewed. Arrays of microplasma emitters, having inverted pyramidal Si electrodes or produced in ceramic multilayer sandwiches with integrated ballasting for each pixel, have been demonstrated and arrays as large as 30 × 30 pixels are described. A new class of photodetectors, hybrid semiconductor/microplasma devices, is shown to exhibit photoresponsivities in the visible and near-infrared that are more than an order of magnitude larger than those typical of semiconductor avalanche photodiodes. Microdischarge devices having refractory or piezoelectric dielectric films such as Al2O3 or BN have extended lifetimes (∼86% of initial radiant output after 100 h with an Al2O3 dielectric) and controllable electrical characteristics. A segmented, linear array of microdischarges, fabricated in a ceramic multilayer structure and having an active length of ∼1 cm and a clear aperture of 80 × 360 μm2, exhibits evidence of gain on the 460.3 nm transition of Xe+, making it the first example of a microdischarge-driven optical amplifier.

Original languageEnglish (US)
Pages (from-to)2869-2877
Number of pages9
JournalJournal of Physics D: Applied Physics
Volume36
Issue number23
DOIs
StatePublished - Dec 7 2003
Externally publishedYes

Fingerprint

microplasmas
Silicon
Photodetectors
photometers
Polymers
Multilayers
emitters
Metals
ceramics
polymers
silicon
Pixels
pixels
metals
Avalanche photodiodes
Light amplifiers
Dielectric films
linear arrays
refractories
Semiconductor devices

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Eden, J. G., Park, S. J., Ostrom, N. P., McCain, S. T., Wagner, C. J., Vojak, B. A., ... Ewing, J. J. (2003). Microplasma devices fabricated in silicon, ceramic, and metal/polymer structures: Arrays, emitters and photodetectors. Journal of Physics D: Applied Physics, 36(23), 2869-2877. https://doi.org/10.1088/0022-3727/36/23/001

Microplasma devices fabricated in silicon, ceramic, and metal/polymer structures : Arrays, emitters and photodetectors. / Eden, J. G.; Park, S. J.; Ostrom, N. P.; McCain, S. T.; Wagner, C. J.; Vojak, B. A.; Chen, J.; Liu, C.; Von Allmen, P.; Zenhausern, Frederic; Sadler, D. J.; Jensen, C.; Wilcox, D. L.; Ewing, J. J.

In: Journal of Physics D: Applied Physics, Vol. 36, No. 23, 07.12.2003, p. 2869-2877.

Research output: Contribution to journalArticle

Eden, JG, Park, SJ, Ostrom, NP, McCain, ST, Wagner, CJ, Vojak, BA, Chen, J, Liu, C, Von Allmen, P, Zenhausern, F, Sadler, DJ, Jensen, C, Wilcox, DL & Ewing, JJ 2003, 'Microplasma devices fabricated in silicon, ceramic, and metal/polymer structures: Arrays, emitters and photodetectors', Journal of Physics D: Applied Physics, vol. 36, no. 23, pp. 2869-2877. https://doi.org/10.1088/0022-3727/36/23/001
Eden, J. G. ; Park, S. J. ; Ostrom, N. P. ; McCain, S. T. ; Wagner, C. J. ; Vojak, B. A. ; Chen, J. ; Liu, C. ; Von Allmen, P. ; Zenhausern, Frederic ; Sadler, D. J. ; Jensen, C. ; Wilcox, D. L. ; Ewing, J. J. / Microplasma devices fabricated in silicon, ceramic, and metal/polymer structures : Arrays, emitters and photodetectors. In: Journal of Physics D: Applied Physics. 2003 ; Vol. 36, No. 23. pp. 2869-2877.
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