Abstract
Recent advances in the development of microplasma devices fabricated in a variety of materials systems (Si, ceramic multilayers, and metal/polymer structures) and configurations are reviewed. Arrays of microplasma emitters, having inverted pyramidal Si electrodes or produced in ceramic multilayer sandwiches with integrated ballasting for each pixel, have been demonstrated and arrays as large as 30 × 30 pixels are described. A new class of photodetectors, hybrid semiconductor/microplasma devices, is shown to exhibit photoresponsivities in the visible and near-infrared that are more than an order of magnitude larger than those typical of semiconductor avalanche photodiodes. Microdischarge devices having refractory or piezoelectric dielectric films such as Al2O3 or BN have extended lifetimes (∼86% of initial radiant output after 100 h with an Al2O3 dielectric) and controllable electrical characteristics. A segmented, linear array of microdischarges, fabricated in a ceramic multilayer structure and having an active length of ∼1 cm and a clear aperture of 80 × 360 μm2, exhibits evidence of gain on the 460.3 nm transition of Xe+, making it the first example of a microdischarge-driven optical amplifier.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2869-2877 |
| Number of pages | 9 |
| Journal | Journal of Physics D: Applied Physics |
| Volume | 36 |
| Issue number | 23 |
| DOIs | |
| State | Published - Dec 7 2003 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
Cite this
Microplasma devices fabricated in silicon, ceramic, and metal/polymer structures : Arrays, emitters and photodetectors. / Eden, J. G.; Park, S. J.; Ostrom, N. P.; McCain, S. T.; Wagner, C. J.; Vojak, B. A.; Chen, J.; Liu, C.; Von Allmen, P.; Zenhausern, Frederic; Sadler, D. J.; Jensen, C.; Wilcox, D. L.; Ewing, J. J.
In: Journal of Physics D: Applied Physics, Vol. 36, No. 23, 07.12.2003, p. 2869-2877.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Microplasma devices fabricated in silicon, ceramic, and metal/polymer structures
T2 - Arrays, emitters and photodetectors
AU - Eden, J. G.
AU - Park, S. J.
AU - Ostrom, N. P.
AU - McCain, S. T.
AU - Wagner, C. J.
AU - Vojak, B. A.
AU - Chen, J.
AU - Liu, C.
AU - Von Allmen, P.
AU - Zenhausern, Frederic
AU - Sadler, D. J.
AU - Jensen, C.
AU - Wilcox, D. L.
AU - Ewing, J. J.
PY - 2003/12/7
Y1 - 2003/12/7
N2 - Recent advances in the development of microplasma devices fabricated in a variety of materials systems (Si, ceramic multilayers, and metal/polymer structures) and configurations are reviewed. Arrays of microplasma emitters, having inverted pyramidal Si electrodes or produced in ceramic multilayer sandwiches with integrated ballasting for each pixel, have been demonstrated and arrays as large as 30 × 30 pixels are described. A new class of photodetectors, hybrid semiconductor/microplasma devices, is shown to exhibit photoresponsivities in the visible and near-infrared that are more than an order of magnitude larger than those typical of semiconductor avalanche photodiodes. Microdischarge devices having refractory or piezoelectric dielectric films such as Al2O3 or BN have extended lifetimes (∼86% of initial radiant output after 100 h with an Al2O3 dielectric) and controllable electrical characteristics. A segmented, linear array of microdischarges, fabricated in a ceramic multilayer structure and having an active length of ∼1 cm and a clear aperture of 80 × 360 μm2, exhibits evidence of gain on the 460.3 nm transition of Xe+, making it the first example of a microdischarge-driven optical amplifier.
AB - Recent advances in the development of microplasma devices fabricated in a variety of materials systems (Si, ceramic multilayers, and metal/polymer structures) and configurations are reviewed. Arrays of microplasma emitters, having inverted pyramidal Si electrodes or produced in ceramic multilayer sandwiches with integrated ballasting for each pixel, have been demonstrated and arrays as large as 30 × 30 pixels are described. A new class of photodetectors, hybrid semiconductor/microplasma devices, is shown to exhibit photoresponsivities in the visible and near-infrared that are more than an order of magnitude larger than those typical of semiconductor avalanche photodiodes. Microdischarge devices having refractory or piezoelectric dielectric films such as Al2O3 or BN have extended lifetimes (∼86% of initial radiant output after 100 h with an Al2O3 dielectric) and controllable electrical characteristics. A segmented, linear array of microdischarges, fabricated in a ceramic multilayer structure and having an active length of ∼1 cm and a clear aperture of 80 × 360 μm2, exhibits evidence of gain on the 460.3 nm transition of Xe+, making it the first example of a microdischarge-driven optical amplifier.
UR - http://www.scopus.com/inward/record.url?scp=0348252386&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0348252386&partnerID=8YFLogxK
U2 - 10.1088/0022-3727/36/23/001
DO - 10.1088/0022-3727/36/23/001
M3 - Article
VL - 36
SP - 2869
EP - 2877
JO - Journal Physics D: Applied Physics
JF - Journal Physics D: Applied Physics
SN - 0022-3727
IS - 23
ER -