Microscope system for Blu-ray disc samples

Jun Zhang, Seung Hune Yang, Youngsik Kim, Tom D. Milster, Jong Rak Park

Research output: Contribution to journalArticle

Abstract

We introduce a microscope system using a solid immersion lens (SIL) to image Blu-ray disc samples without removing the protective cover layer. The aberration caused by the cover layer is minimized with a truncated SIL. A subsurface imaging simulation is achieved by using the rigorous coupled wave theory, partial coherence, vector diffraction, and the Babinet principle. Simulated results are compared with experimental images and atomic force microscopy measurements.

Original languageEnglish (US)
Pages (from-to)6878-6887
Number of pages10
JournalApplied optics
Volume49
Issue number36
DOIs
StatePublished - Dec 20 2010

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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  • Cite this

    Zhang, J., Yang, S. H., Kim, Y., Milster, T. D., & Park, J. R. (2010). Microscope system for Blu-ray disc samples. Applied optics, 49(36), 6878-6887. https://doi.org/10.1364/AO.49.006878