Miniature, fiber-coupled 3-DOF interferometer for precision micro-motion stage metrology

Steven Gillmer, Richard Smith, Shane C. Woody, Joshua Tarbutton, Jonathan D. Ellis

Research output: Contribution to conferencePaper

1 Scopus citations
Original languageEnglish (US)
Pages77-80
Number of pages4
StatePublished - Dec 1 2012
Event27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012 - San Diego, CA, United States
Duration: Oct 21 2012Oct 26 2012

Conference

Conference27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012
CountryUnited States
CitySan Diego, CA
Period10/21/1210/26/12

ASJC Scopus subject areas

  • Engineering (miscellaneous)

Cite this

Gillmer, S., Smith, R., Woody, S. C., Tarbutton, J., & Ellis, J. D. (2012). Miniature, fiber-coupled 3-DOF interferometer for precision micro-motion stage metrology. 77-80. Paper presented at 27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012, San Diego, CA, United States.