The experimental data for the anisotropic component of the angular distribution of electron-beam evaporation sources are usually described in terms of the cos**n theta dependence. In this paper a simple model for calculating angular distributions is presented. The generally used dependence appears as a particular case in the model.
|Original language||English (US)|
|Number of pages||4|
|Journal||Electrocomponent Science and Technology|
|Publication status||Published - 1979|
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