MODEL FOR DESCRIBING EMISSION CHARACTERISTICS OF ELECTRON-BEAM EVAPORATION SOURCES.

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Abstract

The experimental data for the anisotropic component of the angular distribution of electron-beam evaporation sources are usually described in terms of the cos**n theta dependence. In this paper a simple model for calculating angular distributions is presented. The generally used dependence appears as a particular case in the model.

Original languageEnglish (US)
Pages (from-to)9-12
Number of pages4
JournalElectrocomponent Science and Technology
Volume6
Issue number1
Publication statusPublished - 1979
Externally publishedYes

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ASJC Scopus subject areas

  • Engineering(all)

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