Model for Describing Emission Characteristics of Electron-Beam Evaporation Sources

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

The experimental data for the anistropic component of the angular distribution of electron-beam evaporation sources are usually described in terms of the cosnd dependence. In this paper a simple model for calculating angular distributions is presented. The generally used dependence appears as a particular case in the model.

Original languageEnglish (US)
Pages (from-to)9-12
Number of pages4
JournalElectroComponent Science and Technology
Volume6
Issue number1
DOIs
StatePublished - Jan 1 1979
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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