Modeling

Leonard Borucki, Ara Philipossian

Research output: Chapter in Book/Report/Conference proceedingChapter

2 Scopus citations
Original languageEnglish (US)
Title of host publicationMicroelectronic Applications of Chemical Mechanical Planarization
PublisherJohn Wiley & Sons, Inc.
Pages171-200
Number of pages30
ISBN (Print)9780471719199
DOIs
StatePublished - Mar 23 2007

Keywords

  • Elastohydrodynamic lubrication
  • Mean pad leading edge temperature
  • Roughness-dominated and asperity filtering regimes

ASJC Scopus subject areas

  • Chemical Engineering(all)

Cite this