Modeling of a thin film pyroelectric pixel: Steady state results

G. Teowee, D. R. Uhlmann

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

Pyroelectric thin films are receiving increasing attention for the next generation of integrated room temperature uncooled IR arrays. In this study, steady state modeling of a pixel consisting of black absorber, pyroelectric, Pt, TiO2, SiO2 and Si are performed. Thermal conduction and radiative transfer are assumed to take place across this stack and at the Si substrate-air interface respectively. The effects of individual film thickness, IR chopping frequency, thermal conductivity of the thermal barrier layer and substrate thickness on pyroelectric responsivity are evaluated. At low chopping frequencies, large thermal isolation is crucial to obtain optimal pyroelectric responsivity but at high frequencies, the pyroelectric response is independent of thermal isolation. Large responsivities are also obtained by using thin Si substrates. The modeling also considers air bridge structures, typically used in microelectromechanical devices.

Original languageEnglish (US)
Pages (from-to)411-419
Number of pages9
JournalIntegrated Ferroelectrics
Volume22
Issue number1-4
DOIs
StatePublished - Jan 1 1998

Keywords

  • Ferroelectric
  • Films
  • IR arrays
  • Modeling
  • Pyroelectric

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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