Modeling of a thin film pyroelectric pixel

Steady state results

G. Teowee, Donald R Uhlmann

Research output: Chapter in Book/Report/Conference proceedingChapter

3 Citations (Scopus)

Abstract

Pyroelectric thin films are receiving increasing attention for the next generation of integrated room temperature uncooled IR arrays. In this study, steady state modeling of a pixel consisting of black absorber, pyroelectric, Pt, TiO2, SiO2 and Si are performed. Thermal conduction and radiative transfer are assumed to take place across this stack and at the Si substrate-air interface respectively. The effects of individual film thickness, IR chopping frequency, thermal conductivity of the thermal barrier layer and substrate thickness on pyroelectric responsivity are evaluated. At low chopping frequencies, large thermal isolation is crucial to obtain optimal pyroelectric responsivity but at high frequencies, the pyroelectric response is independent of thermal isolation. Large responsivities are also obtained by using thin Si substrates. The modeling also considers air bridge structures, typically used in microelectromechanical devices.

Original languageEnglish (US)
Title of host publicationIntegrated Ferroelectrics
Pages411-419
Number of pages9
Volume22
Edition1-4
StatePublished - 1998

Fingerprint

Pixels
pixels
Thin films
isolation
thin films
bridges (structures)
Substrates
Microelectromechanical devices
air
barrier layers
radiative transfer
absorbers
Radiative transfer
film thickness
thermal conductivity
Air
low frequencies
Film thickness
conduction
Thermal conductivity

Keywords

  • Ferroelectric
  • Films
  • IR arrays
  • Modeling
  • Pyroelectric

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics

Cite this

Teowee, G., & Uhlmann, D. R. (1998). Modeling of a thin film pyroelectric pixel: Steady state results. In Integrated Ferroelectrics (1-4 ed., Vol. 22, pp. 411-419)

Modeling of a thin film pyroelectric pixel : Steady state results. / Teowee, G.; Uhlmann, Donald R.

Integrated Ferroelectrics. Vol. 22 1-4. ed. 1998. p. 411-419.

Research output: Chapter in Book/Report/Conference proceedingChapter

Teowee, G & Uhlmann, DR 1998, Modeling of a thin film pyroelectric pixel: Steady state results. in Integrated Ferroelectrics. 1-4 edn, vol. 22, pp. 411-419.
Teowee G, Uhlmann DR. Modeling of a thin film pyroelectric pixel: Steady state results. In Integrated Ferroelectrics. 1-4 ed. Vol. 22. 1998. p. 411-419
Teowee, G. ; Uhlmann, Donald R. / Modeling of a thin film pyroelectric pixel : Steady state results. Integrated Ferroelectrics. Vol. 22 1-4. ed. 1998. pp. 411-419
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