Modeling of a thin film pyroelectric pixel: Transient results

G. Teowee, D. R. Uhlmann

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

Pyroelectric thin films are receiving increasing attention for the next generation of integrated room temperature uncooled IR arrays. Pixel size and NETD (net equivalent temperature difference) of 50 μm and 0.005K are projected respectively. In this study, the 1-D transient response of a pixel consisting of black absorber, pyroelectric, Pt, TiO2, SiO2 and Si are performed. Thermal conduction and radiative transfer are assumed to take place across this stack and at the Si substrate-air interface, respectively. The effects of individual film thickness, IR chopping frequency, thermal conductivity of the thermal barrier layer and substrate thickness on the pyroelectric response are investigated.

Original languageEnglish (US)
Pages (from-to)421-429
Number of pages9
JournalIntegrated Ferroelectrics
Volume22
Issue number1-4
DOIs
StatePublished - Jan 1 1998

Keywords

  • Ferroelectric
  • Films
  • IR arrays
  • Modeling
  • Pyroelectric

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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