Modeling of bottom antireflection layers: sensitivity to optical constants

Ralph R. Dammel, Robert A. Norwood

Research output: Chapter in Book/Report/Conference proceedingConference contribution

22 Scopus citations

Fingerprint

Dive into the research topics of 'Modeling of bottom antireflection layers: sensitivity to optical constants'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Mathematics

Physics & Astronomy