Moisture uptake and outgassing in patterned and capped porous low- k dielectric films

Junpin Yao, Asad Iqbal, Harpreet Juneja, Farhang Shadman

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

The interactions of moisture with spin-on porous methylsilsesquioxane (p-MSQ) low- k dielectric films are investigated by on-line and real-time measurement of the rates of moisture uptake and removal. A process model is developed that provides information on the dynamics of moisture adsorption and desorption processes. The process model can be used to find optimum purge temperature and gas purity condition for cleaning and drying of low- k films. The cured p-MSQ films are compared with the partially etched and N2 H2 ashed films. The results show that these two films have similar moisture solubilities; however, the moisture diffusivity in the patterned film is considerably higher. Transmission electron microscope results show that the etching and ashing processes not only decrease the overall film thickness but also increase the film porosity. The process model also provides information on moisture distribution within the film; this information is important in characterizing residual moisture and interfacial adhesion. The results for a wide range of diffusivity show that thin cap layers with low moisture solubility effectively block moisture penetration into the p-MSQ film without slowing down the outgassing and moisture removal during the purge.

Original languageEnglish (US)
JournalJournal of the Electrochemical Society
Volume154
Issue number10
DOIs
StatePublished - 2007

Fingerprint

Dielectric films
outgassing
Degassing
moisture
Moisture
diffusivity
solubility
Solubility
Low-k dielectric
Time measurement
caps
cleaning
drying
Film thickness
Etching
Cleaning
Desorption
Drying
purity
adhesion

ASJC Scopus subject areas

  • Electrochemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Moisture uptake and outgassing in patterned and capped porous low- k dielectric films. / Yao, Junpin; Iqbal, Asad; Juneja, Harpreet; Shadman, Farhang.

In: Journal of the Electrochemical Society, Vol. 154, No. 10, 2007.

Research output: Contribution to journalArticle

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