Mo/Y multilayer mirrors for the 8-12-nm wavelength region

Claude Montcalm, Brian T. Sullivan, M. Ranger, J. M. Slaughter, Patrick A. Kearney, Charles M Falco, M. Chaker

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

This paper describes the deposition and characterization of Mo/Y multilayer mirrors. Reflectance measurements at normal incidence show peak reflectances of 34% at 11.5 nm and 22% at 8.1 nm respectively. It is observed that the base pressure of the dc magnetron sputter deposition effects the contamination of the layers and the interface roughness, although the partial pressure of the different gas species is more important than the base pressure.

Original languageEnglish (US)
Pages (from-to)1004-1006
Number of pages3
JournalOptics Letters
Volume19
Issue number13
StatePublished - Jul 1 1994

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base pressure
mirrors
reflectance
wavelengths
partial pressure
contamination
roughness
incidence
gases

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Montcalm, C., Sullivan, B. T., Ranger, M., Slaughter, J. M., Kearney, P. A., Falco, C. M., & Chaker, M. (1994). Mo/Y multilayer mirrors for the 8-12-nm wavelength region. Optics Letters, 19(13), 1004-1006.

Mo/Y multilayer mirrors for the 8-12-nm wavelength region. / Montcalm, Claude; Sullivan, Brian T.; Ranger, M.; Slaughter, J. M.; Kearney, Patrick A.; Falco, Charles M; Chaker, M.

In: Optics Letters, Vol. 19, No. 13, 01.07.1994, p. 1004-1006.

Research output: Contribution to journalArticle

Montcalm, C, Sullivan, BT, Ranger, M, Slaughter, JM, Kearney, PA, Falco, CM & Chaker, M 1994, 'Mo/Y multilayer mirrors for the 8-12-nm wavelength region', Optics Letters, vol. 19, no. 13, pp. 1004-1006.
Montcalm C, Sullivan BT, Ranger M, Slaughter JM, Kearney PA, Falco CM et al. Mo/Y multilayer mirrors for the 8-12-nm wavelength region. Optics Letters. 1994 Jul 1;19(13):1004-1006.
Montcalm, Claude ; Sullivan, Brian T. ; Ranger, M. ; Slaughter, J. M. ; Kearney, Patrick A. ; Falco, Charles M ; Chaker, M. / Mo/Y multilayer mirrors for the 8-12-nm wavelength region. In: Optics Letters. 1994 ; Vol. 19, No. 13. pp. 1004-1006.
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