Mo/Y multilayer mirrors for the 8-12 nm wavelength region

Claude Montcalm, Brian T. Sullivan, M. Ranger, J. M. Slaughter, Patrick A. Kearney, Charles M Falco, M. Chaker

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

This paper describes the deposition and measurement of peak reflectances of 34% at 11.5 nm and 22% at 8.1 nm for Mo/Y multilayers, which are the best for wavelengths below 13 nm. The reflectances are improved by reducing to a great extent the effect of contamination. The other factor that influences the performance is the interface roughness.

Original languageEnglish (US)
Pages (from-to)1173-1175
Number of pages3
JournalOptics Letters
Volume19
Issue number15
StatePublished - Aug 1 1994

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mirrors
reflectance
wavelengths
contamination
roughness

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Montcalm, C., Sullivan, B. T., Ranger, M., Slaughter, J. M., Kearney, P. A., Falco, C. M., & Chaker, M. (1994). Mo/Y multilayer mirrors for the 8-12 nm wavelength region. Optics Letters, 19(15), 1173-1175.

Mo/Y multilayer mirrors for the 8-12 nm wavelength region. / Montcalm, Claude; Sullivan, Brian T.; Ranger, M.; Slaughter, J. M.; Kearney, Patrick A.; Falco, Charles M; Chaker, M.

In: Optics Letters, Vol. 19, No. 15, 01.08.1994, p. 1173-1175.

Research output: Contribution to journalArticle

Montcalm, C, Sullivan, BT, Ranger, M, Slaughter, JM, Kearney, PA, Falco, CM & Chaker, M 1994, 'Mo/Y multilayer mirrors for the 8-12 nm wavelength region', Optics Letters, vol. 19, no. 15, pp. 1173-1175.
Montcalm C, Sullivan BT, Ranger M, Slaughter JM, Kearney PA, Falco CM et al. Mo/Y multilayer mirrors for the 8-12 nm wavelength region. Optics Letters. 1994 Aug 1;19(15):1173-1175.
Montcalm, Claude ; Sullivan, Brian T. ; Ranger, M. ; Slaughter, J. M. ; Kearney, Patrick A. ; Falco, Charles M ; Chaker, M. / Mo/Y multilayer mirrors for the 8-12 nm wavelength region. In: Optics Letters. 1994 ; Vol. 19, No. 15. pp. 1173-1175.
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