Multi-angle generalized ellipsometry of anisotropic optical structures

Neil A. Beaudry, Yanming Zhao, Russell A Chipman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A new technique for simultaneous multi-angle ellipsometric measurements of anisotropic optical structures such as films used in the display industry is introduced. A very small area on the sample is illuminated with a focused beam which after it interacts with the sample and is polarization analyzed is spread across a CCD. Each pixed collects light from a different angle incident on the sample allowing data collection at numerous incident angles simultaneously. The small but significant polarization aberrations of the microscope objectives provide a significant challenge to accurate measurement A mathematical description of the ellipsometric technique is presented. The optical properties of two biaxial samples, a stretched plastic retarder element used for correcting angle of incident effects in LC displays, and a thin layer of E-type polarizing dried liquid crystal material are measured and maps of the ellipsometric parameters ψ and Δ as a function incident and azimuthal angles are presented. Data from both samples are reduced using an iterative algorithm with a biaxial thin film modeling software package to compute all three principle components of the dielectric tensor as well as it's orientation.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsJ.A. Shaw, J.S. Tyo
Pages1-11
Number of pages11
Volume5888
DOIs
StatePublished - 2005
EventPolarization Science and Remote Sensing II - San Diego, CA, United States
Duration: Aug 2 2005Aug 4 2005

Other

OtherPolarization Science and Remote Sensing II
CountryUnited States
CitySan Diego, CA
Period8/2/058/4/05

Fingerprint

Ellipsometry
ellipsometry
Display devices
Polarization
Angle measurement
Aberrations
Charge coupled devices
Software packages
Liquid crystals
Tensors
Microscopes
Optical properties
Plastics
Thin films
retarders
polarization
Industry
aberration
charge coupled devices
plastics

Keywords

  • Anisotropic materials
  • Biaxial films
  • Birefringence
  • Dichroism
  • Dielectric tensor
  • Ellipsometry
  • Polarization

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Beaudry, N. A., Zhao, Y., & Chipman, R. A. (2005). Multi-angle generalized ellipsometry of anisotropic optical structures. In J. A. Shaw, & J. S. Tyo (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5888, pp. 1-11). [588808] https://doi.org/10.1117/12.618163

Multi-angle generalized ellipsometry of anisotropic optical structures. / Beaudry, Neil A.; Zhao, Yanming; Chipman, Russell A.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / J.A. Shaw; J.S. Tyo. Vol. 5888 2005. p. 1-11 588808.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Beaudry, NA, Zhao, Y & Chipman, RA 2005, Multi-angle generalized ellipsometry of anisotropic optical structures. in JA Shaw & JS Tyo (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 5888, 588808, pp. 1-11, Polarization Science and Remote Sensing II, San Diego, CA, United States, 8/2/05. https://doi.org/10.1117/12.618163
Beaudry NA, Zhao Y, Chipman RA. Multi-angle generalized ellipsometry of anisotropic optical structures. In Shaw JA, Tyo JS, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5888. 2005. p. 1-11. 588808 https://doi.org/10.1117/12.618163
Beaudry, Neil A. ; Zhao, Yanming ; Chipman, Russell A. / Multi-angle generalized ellipsometry of anisotropic optical structures. Proceedings of SPIE - The International Society for Optical Engineering. editor / J.A. Shaw ; J.S. Tyo. Vol. 5888 2005. pp. 1-11
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