Multidisciplinary approaches target ES & H

Ron Chiarello, Anthony J Muscat, Duane Boning, Karen Gleason, Simon Karecki, Srini Raghavanl

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Traditionally, environmental aspects of IC manufacture have been approached from the facilities level. These efforts focus on preparing a process fluid or treating a waste stream to meet local, national and international regulations in place at the time. The challenges typically involve finding a means to dilute, abate, neutralize or purify a fluid. The most obvious examples of this approach include diluting standard aqueous chemistries to clean wafers and treating water and chemical wastes before disposal. In part because of the technical nature of the industry and its high profile in the world's economy, government agencies look to the semiconductor industry to invent and champion new approaches to incorporate environmental considerations into technology.

Original languageEnglish (US)
Pages (from-to)62-66
Number of pages5
JournalSemiconductor International
Volume22
Issue number2
StatePublished - Feb 1999

Fingerprint

Industry
industries
Chemical wastes
waste disposal
Government Agencies
Semiconductors
Fluids
fluids
economy
Waste disposal
wafers
chemistry
Semiconductor materials
Technology
Water
profiles
water

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Chiarello, R., Muscat, A. J., Boning, D., Gleason, K., Karecki, S., & Raghavanl, S. (1999). Multidisciplinary approaches target ES & H. Semiconductor International, 22(2), 62-66.

Multidisciplinary approaches target ES & H. / Chiarello, Ron; Muscat, Anthony J; Boning, Duane; Gleason, Karen; Karecki, Simon; Raghavanl, Srini.

In: Semiconductor International, Vol. 22, No. 2, 02.1999, p. 62-66.

Research output: Contribution to journalArticle

Chiarello, R, Muscat, AJ, Boning, D, Gleason, K, Karecki, S & Raghavanl, S 1999, 'Multidisciplinary approaches target ES & H', Semiconductor International, vol. 22, no. 2, pp. 62-66.
Chiarello R, Muscat AJ, Boning D, Gleason K, Karecki S, Raghavanl S. Multidisciplinary approaches target ES & H. Semiconductor International. 1999 Feb;22(2):62-66.
Chiarello, Ron ; Muscat, Anthony J ; Boning, Duane ; Gleason, Karen ; Karecki, Simon ; Raghavanl, Srini. / Multidisciplinary approaches target ES & H. In: Semiconductor International. 1999 ; Vol. 22, No. 2. pp. 62-66.
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